Laser induced crystallization of Co–Fe–B films

Abstract Local crystallization of ferromagnetic layers is crucial in the successful realization of miniaturized tunneling magnetoresistance (TMR) devices. In the case of Co–Fe–B TMR devices, used most successfully so far in applications and devices, Co–Fe–B layers are initially deposited in an amorp...

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Autores principales:	Maria Almeida, Apoorva Sharma, Patrick Matthes, Nicole Köhler, Sandra Busse, Matthias Müller, Olav Hellwig, Alexander Horn, Dietrich R. T. Zahn, Georgeta Salvan, Stefan E. Schulz
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/a71770f66b1d4f3b85959bacd66faa9d
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spelling	oai:doaj.org-article:a71770f66b1d4f3b85959bacd66faa9d2021-12-02T16:15:06ZLaser induced crystallization of Co–Fe–B films10.1038/s41598-021-93009-x2045-2322https://doaj.org/article/a71770f66b1d4f3b85959bacd66faa9d2021-07-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-93009-xhttps://doaj.org/toc/2045-2322Abstract Local crystallization of ferromagnetic layers is crucial in the successful realization of miniaturized tunneling magnetoresistance (TMR) devices. In the case of Co–Fe–B TMR devices, used most successfully so far in applications and devices, Co–Fe–B layers are initially deposited in an amorphous state and annealed post-deposition to induce crystallization in Co–Fe, thereby increasing the device performance. In this work, first direct proof of locally triggered crystallization of 10 nm thick Co–Fe–B films by laser irradiation is provided by means of X-ray diffraction (XRD) using synchrotron radiation. A comparison with furnace annealing is performed for benchmarking purposes, covering different annealing parameters, including temperature and duration in the case of furnace annealing, as well as laser intensity and scanning speed for the laser annealing. Films of Co–Fe–B with different stoichiometry sandwiched between a Ru and a Ta or MgO layer were systematically assessed by XRD and SQUID magnetometry in order to elucidate the crystallization mechanisms. The transformation of Co–Fe–B films from amorphous to crystalline is revealed by the presence of pronounced CoFe(110) and/or CoFe(200) reflexes in the XRD θ-2θ scans, depending on the capping layer. For a certain window of parameters, comparable crystallization yields are obtained with furnace and laser annealing. Samples with an MgO capping layer required a slightly lower laser intensity to achieve equivalent Co–Fe crystallization yields, highlighting the potential of laser annealing to locally enhance the TMR ratio.Maria AlmeidaApoorva SharmaPatrick MatthesNicole KöhlerSandra BusseMatthias MüllerOlav HellwigAlexander HornDietrich R. T. ZahnGeorgeta SalvanStefan E. SchulzNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-10 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Maria Almeida Apoorva Sharma Patrick Matthes Nicole Köhler Sandra Busse Matthias Müller Olav Hellwig Alexander Horn Dietrich R. T. Zahn Georgeta Salvan Stefan E. Schulz Laser induced crystallization of Co–Fe–B films
description	Abstract Local crystallization of ferromagnetic layers is crucial in the successful realization of miniaturized tunneling magnetoresistance (TMR) devices. In the case of Co–Fe–B TMR devices, used most successfully so far in applications and devices, Co–Fe–B layers are initially deposited in an amorphous state and annealed post-deposition to induce crystallization in Co–Fe, thereby increasing the device performance. In this work, first direct proof of locally triggered crystallization of 10 nm thick Co–Fe–B films by laser irradiation is provided by means of X-ray diffraction (XRD) using synchrotron radiation. A comparison with furnace annealing is performed for benchmarking purposes, covering different annealing parameters, including temperature and duration in the case of furnace annealing, as well as laser intensity and scanning speed for the laser annealing. Films of Co–Fe–B with different stoichiometry sandwiched between a Ru and a Ta or MgO layer were systematically assessed by XRD and SQUID magnetometry in order to elucidate the crystallization mechanisms. The transformation of Co–Fe–B films from amorphous to crystalline is revealed by the presence of pronounced CoFe(110) and/or CoFe(200) reflexes in the XRD θ-2θ scans, depending on the capping layer. For a certain window of parameters, comparable crystallization yields are obtained with furnace and laser annealing. Samples with an MgO capping layer required a slightly lower laser intensity to achieve equivalent Co–Fe crystallization yields, highlighting the potential of laser annealing to locally enhance the TMR ratio.
format	article
author	Maria Almeida Apoorva Sharma Patrick Matthes Nicole Köhler Sandra Busse Matthias Müller Olav Hellwig Alexander Horn Dietrich R. T. Zahn Georgeta Salvan Stefan E. Schulz
author_facet	Maria Almeida Apoorva Sharma Patrick Matthes Nicole Köhler Sandra Busse Matthias Müller Olav Hellwig Alexander Horn Dietrich R. T. Zahn Georgeta Salvan Stefan E. Schulz
author_sort	Maria Almeida
title	Laser induced crystallization of Co–Fe–B films
title_short	Laser induced crystallization of Co–Fe–B films
title_full	Laser induced crystallization of Co–Fe–B films
title_fullStr	Laser induced crystallization of Co–Fe–B films
title_full_unstemmed	Laser induced crystallization of Co–Fe–B films
title_sort	laser induced crystallization of co–fe–b films
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/a71770f66b1d4f3b85959bacd66faa9d
work_keys_str_mv	AT mariaalmeida laserinducedcrystallizationofcofebfilms AT apoorvasharma laserinducedcrystallizationofcofebfilms AT patrickmatthes laserinducedcrystallizationofcofebfilms AT nicolekohler laserinducedcrystallizationofcofebfilms AT sandrabusse laserinducedcrystallizationofcofebfilms AT matthiasmuller laserinducedcrystallizationofcofebfilms AT olavhellwig laserinducedcrystallizationofcofebfilms AT alexanderhorn laserinducedcrystallizationofcofebfilms AT dietrichrtzahn laserinducedcrystallizationofcofebfilms AT georgetasalvan laserinducedcrystallizationofcofebfilms AT stefaneschulz laserinducedcrystallizationofcofebfilms
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Laser induced crystallization of Co–Fe–B films

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