Understanding the effect of wet etching on damage resistance of surface scratches

Abstract Fused silica optics often exhibit surface scratches after polishing that radically reduce their damage resistance at the wavelength of 351 nm in the nanosecond regime. Consequently, chemical treatments after polishing are often used to increase the damage threshold and ensure a safe operati...

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Autores principales: Benoit Da Costa Fernandes, Mathilde Pfiffer, Philippe Cormont, Marc Dussauze, Bruno Bousquet, Evelyne Fargin, Jerome Neauport
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Publicado: Nature Portfolio 2018
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Acceso en línea:https://doaj.org/article/a72e76f10a9c4440adaf80a17bc066d5
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spelling oai:doaj.org-article:a72e76f10a9c4440adaf80a17bc066d52021-12-02T15:08:50ZUnderstanding the effect of wet etching on damage resistance of surface scratches10.1038/s41598-018-19716-02045-2322https://doaj.org/article/a72e76f10a9c4440adaf80a17bc066d52018-01-01T00:00:00Zhttps://doi.org/10.1038/s41598-018-19716-0https://doaj.org/toc/2045-2322Abstract Fused silica optics often exhibit surface scratches after polishing that radically reduce their damage resistance at the wavelength of 351 nm in the nanosecond regime. Consequently, chemical treatments after polishing are often used to increase the damage threshold and ensure a safe operation of these optics in large fusion-scale laser facilities. Here, we investigate the reasons for such an improvement. We study the effect of an HF-based wet etching on scratch morphology and propose a simple analytic model to reflect scratch widening during etching. We also use a finite element model to evaluate the effect of the morphological modification induced by etching on the electric field distribution in the vicinity of the scratch. We evidence that this improvement of the scratch damage resistance is due to a reduction of the electric field enhancement. This conclusion is supported by secondary electron microscopy (SEM) imaging of damage sites initiated on scratches after chemical treatment.Benoit Da Costa FernandesMathilde PfifferPhilippe CormontMarc DussauzeBruno BousquetEvelyne FarginJerome NeauportNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 8, Iss 1, Pp 1-9 (2018)
institution DOAJ
collection DOAJ
language EN
topic Medicine
R
Science
Q
spellingShingle Medicine
R
Science
Q
Benoit Da Costa Fernandes
Mathilde Pfiffer
Philippe Cormont
Marc Dussauze
Bruno Bousquet
Evelyne Fargin
Jerome Neauport
Understanding the effect of wet etching on damage resistance of surface scratches
description Abstract Fused silica optics often exhibit surface scratches after polishing that radically reduce their damage resistance at the wavelength of 351 nm in the nanosecond regime. Consequently, chemical treatments after polishing are often used to increase the damage threshold and ensure a safe operation of these optics in large fusion-scale laser facilities. Here, we investigate the reasons for such an improvement. We study the effect of an HF-based wet etching on scratch morphology and propose a simple analytic model to reflect scratch widening during etching. We also use a finite element model to evaluate the effect of the morphological modification induced by etching on the electric field distribution in the vicinity of the scratch. We evidence that this improvement of the scratch damage resistance is due to a reduction of the electric field enhancement. This conclusion is supported by secondary electron microscopy (SEM) imaging of damage sites initiated on scratches after chemical treatment.
format article
author Benoit Da Costa Fernandes
Mathilde Pfiffer
Philippe Cormont
Marc Dussauze
Bruno Bousquet
Evelyne Fargin
Jerome Neauport
author_facet Benoit Da Costa Fernandes
Mathilde Pfiffer
Philippe Cormont
Marc Dussauze
Bruno Bousquet
Evelyne Fargin
Jerome Neauport
author_sort Benoit Da Costa Fernandes
title Understanding the effect of wet etching on damage resistance of surface scratches
title_short Understanding the effect of wet etching on damage resistance of surface scratches
title_full Understanding the effect of wet etching on damage resistance of surface scratches
title_fullStr Understanding the effect of wet etching on damage resistance of surface scratches
title_full_unstemmed Understanding the effect of wet etching on damage resistance of surface scratches
title_sort understanding the effect of wet etching on damage resistance of surface scratches
publisher Nature Portfolio
publishDate 2018
url https://doaj.org/article/a72e76f10a9c4440adaf80a17bc066d5
work_keys_str_mv AT benoitdacostafernandes understandingtheeffectofwetetchingondamageresistanceofsurfacescratches
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