Microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements

A microelectronic transducer with capacitive elements implementing the principle of humidity to frequency conversion has been developed. Experiments has been conducted for samples of Р14 Rapid humidity-sensitive capacitors (Wired and SMD) of Innovative sensor technology company, HСH-1000 humidity-se...

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Autores principales:	Osadchuk, V., Osadchuk, A., Krylik, L., Seletska, O.
Formato:	article
Lenguaje:	EN
Publicado:	D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2017
Materias:	Physics QC1-999 Electronics TK7800-8360
Acceso en línea:	https://doaj.org/article/a7b26828a1f546408869df7e992ab8c3
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id	oai:doaj.org-article:a7b26828a1f546408869df7e992ab8c3
record_format	dspace
spelling	oai:doaj.org-article:a7b26828a1f546408869df7e992ab8c32021-11-21T11:57:05ZMicroelectronic humidity–frequency transducer with humidity-sensitive capacitive elements537.311.322+621.3822537-63651810-648Xhttps://doaj.org/article/a7b26828a1f546408869df7e992ab8c32017-07-01T00:00:00Zhttps://mjps.nanotech.md/archive/2017/article/71454https://doaj.org/toc/1810-648Xhttps://doaj.org/toc/2537-6365A microelectronic transducer with capacitive elements implementing the principle of humidity to frequency conversion has been developed. Experiments has been conducted for samples of Р14 Rapid humidity-sensitive capacitors (Wired and SMD) of Innovative sensor technology company, HСH-1000 humidity-sensitive capacitors of Honeywell company, and humidity-sensitive MOS capacitor of Helium Research Institute ((Vinnytsya, Ukraine). The essential effect of the physical and chemical properties of the humidity-sensitive layer of the capacitive element on the sensitivity of the humidity–frequency transducer has been experimentally proved. In a range of 18–99% of humidity, the transducer with a humiditysensitive MOS capacitor based on amorphous silicon has the highest sensitivity of 3500 Hz/%. The range of change in the oscillation frequency is 320 kHz.Osadchuk, V.Osadchuk, A.Krylik, L.Seletska, O.D.Ghitu Institute of Electronic Engineering and NanotechnologiesarticlePhysicsQC1-999ElectronicsTK7800-8360ENMoldavian Journal of the Physical Sciences, Vol 16, Iss 1-2, Pp 94-100 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Physics QC1-999 Electronics TK7800-8360
spellingShingle	Physics QC1-999 Electronics TK7800-8360 Osadchuk, V. Osadchuk, A. Krylik, L. Seletska, O. Microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements
description	A microelectronic transducer with capacitive elements implementing the principle of humidity to frequency conversion has been developed. Experiments has been conducted for samples of Р14 Rapid humidity-sensitive capacitors (Wired and SMD) of Innovative sensor technology company, HСH-1000 humidity-sensitive capacitors of Honeywell company, and humidity-sensitive MOS capacitor of Helium Research Institute ((Vinnytsya, Ukraine). The essential effect of the physical and chemical properties of the humidity-sensitive layer of the capacitive element on the sensitivity of the humidity–frequency transducer has been experimentally proved. In a range of 18–99% of humidity, the transducer with a humiditysensitive MOS capacitor based on amorphous silicon has the highest sensitivity of 3500 Hz/%. The range of change in the oscillation frequency is 320 kHz.
format	article
author	Osadchuk, V. Osadchuk, A. Krylik, L. Seletska, O.
author_facet	Osadchuk, V. Osadchuk, A. Krylik, L. Seletska, O.
author_sort	Osadchuk, V.
title	Microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements
title_short	Microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements
title_full	Microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements
title_fullStr	Microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements
title_full_unstemmed	Microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements
title_sort	microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements
publisher	D.Ghitu Institute of Electronic Engineering and Nanotechnologies
publishDate	2017
url	https://doaj.org/article/a7b26828a1f546408869df7e992ab8c3
work_keys_str_mv	AT osadchukv microelectronichumidityfrequencytransducerwithhumiditysensitivecapacitiveelements AT osadchuka microelectronichumidityfrequencytransducerwithhumiditysensitivecapacitiveelements AT krylikl microelectronichumidityfrequencytransducerwithhumiditysensitivecapacitiveelements AT seletskao microelectronichumidityfrequencytransducerwithhumiditysensitivecapacitiveelements
_version_	1718419382148792320

Microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements

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