Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
Direct transfer of pre-patterned materials strongly benefits realisation of integrated functional systems over conventional fabrication process. Here, the authors demonstrate a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial des...
Guardado en:
| Autores principales: | , , , |
|---|---|
| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2021
|
| Materias: | |
| Acceso en línea: | https://doaj.org/article/a825464efc364832921bdfcd085eab94 |
| Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|