Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
Direct transfer of pre-patterned materials strongly benefits realisation of integrated functional systems over conventional fabrication process. Here, the authors demonstrate a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial des...
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| Autores principales: | , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/a825464efc364832921bdfcd085eab94 |
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