Quantitative material analysis using secondary electron energy spectromicroscopy

Abstract This paper demonstrates how secondary electron energy spectroscopy (SEES) performed inside a scanning electron microscope (SEM) can be used to map sample atomic number and acquire bulk valence band density of states (DOS) information at low primary beam voltages. The technique uses an elect...

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Autores principales:	W. Han, M. Zheng, A. Banerjee, Y. Z. Luo, L. Shen, A. Khursheed
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2020
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/abe81d534f9f41fabb27df99accfaff3
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spelling	oai:doaj.org-article:abe81d534f9f41fabb27df99accfaff32021-12-02T12:42:18ZQuantitative material analysis using secondary electron energy spectromicroscopy10.1038/s41598-020-78973-02045-2322https://doaj.org/article/abe81d534f9f41fabb27df99accfaff32020-12-01T00:00:00Zhttps://doi.org/10.1038/s41598-020-78973-0https://doaj.org/toc/2045-2322Abstract This paper demonstrates how secondary electron energy spectroscopy (SEES) performed inside a scanning electron microscope (SEM) can be used to map sample atomic number and acquire bulk valence band density of states (DOS) information at low primary beam voltages. The technique uses an electron energy analyser attachment to detect small changes in the shape of the scattered secondary electron (SE) spectrum and extract out fine structure features from it. Close agreement between experimental and theoretical bulk valance band DOS distributions was obtained for six different test samples, where the normalised root mean square deviation ranged from 2.7 to 6.7%. High accuracy levels of this kind do not appear to have been reported before. The results presented in this paper point towards SEES becoming a quantitative material analysis companion tool for low voltage scanning electron microscopy (LVSEM) and providing new applications for Scanning Auger Microscopy (SAM) instruments.W. HanM. ZhengA. BanerjeeY. Z. LuoL. ShenA. KhursheedNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 10, Iss 1, Pp 1-14 (2020)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q W. Han M. Zheng A. Banerjee Y. Z. Luo L. Shen A. Khursheed Quantitative material analysis using secondary electron energy spectromicroscopy
description	Abstract This paper demonstrates how secondary electron energy spectroscopy (SEES) performed inside a scanning electron microscope (SEM) can be used to map sample atomic number and acquire bulk valence band density of states (DOS) information at low primary beam voltages. The technique uses an electron energy analyser attachment to detect small changes in the shape of the scattered secondary electron (SE) spectrum and extract out fine structure features from it. Close agreement between experimental and theoretical bulk valance band DOS distributions was obtained for six different test samples, where the normalised root mean square deviation ranged from 2.7 to 6.7%. High accuracy levels of this kind do not appear to have been reported before. The results presented in this paper point towards SEES becoming a quantitative material analysis companion tool for low voltage scanning electron microscopy (LVSEM) and providing new applications for Scanning Auger Microscopy (SAM) instruments.
format	article
author	W. Han M. Zheng A. Banerjee Y. Z. Luo L. Shen A. Khursheed
author_facet	W. Han M. Zheng A. Banerjee Y. Z. Luo L. Shen A. Khursheed
author_sort	W. Han
title	Quantitative material analysis using secondary electron energy spectromicroscopy
title_short	Quantitative material analysis using secondary electron energy spectromicroscopy
title_full	Quantitative material analysis using secondary electron energy spectromicroscopy
title_fullStr	Quantitative material analysis using secondary electron energy spectromicroscopy
title_full_unstemmed	Quantitative material analysis using secondary electron energy spectromicroscopy
title_sort	quantitative material analysis using secondary electron energy spectromicroscopy
publisher	Nature Portfolio
publishDate	2020
url	https://doaj.org/article/abe81d534f9f41fabb27df99accfaff3
work_keys_str_mv	AT whan quantitativematerialanalysisusingsecondaryelectronenergyspectromicroscopy AT mzheng quantitativematerialanalysisusingsecondaryelectronenergyspectromicroscopy AT abanerjee quantitativematerialanalysisusingsecondaryelectronenergyspectromicroscopy AT yzluo quantitativematerialanalysisusingsecondaryelectronenergyspectromicroscopy AT lshen quantitativematerialanalysisusingsecondaryelectronenergyspectromicroscopy AT akhursheed quantitativematerialanalysisusingsecondaryelectronenergyspectromicroscopy
_version_	1718393704209711104

Quantitative material analysis using secondary electron energy spectromicroscopy

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