Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 1: Direct synthesis
Novel technical solutions and ideas for increasing the yield of solar and semiconductor grade polycrystalline silicon processes have been analyzed. The predominant polycrystalline silicon technology is currently still the Siemens process including the conversion of technical grade silicon (synthesiz...
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| Main Authors: | , , |
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| Format: | article |
| Language: | EN |
| Published: |
Pensoft Publishers
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/b06798a64b184177b2bf316d7486b84f |
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