Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 1: Direct synthesis

Novel technical solutions and ideas for increasing the yield of solar and semiconductor grade polycrystalline silicon processes have been analyzed. The predominant polycrystalline silicon technology is currently still the Siemens process including the conversion of technical grade silicon (synthesiz...

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Autores principales: Vladimir N. Jarkin, Oleg A. Kisarin, Tatyana V. Kritskaya
Formato: article
Lenguaje:EN
Publicado: Pensoft Publishers 2021
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Acceso en línea:https://doaj.org/article/b06798a64b184177b2bf316d7486b84f
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