All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition
Thin films of metal-organic frameworks (MOFs) are promising for catalysis, gas storage, and microelectronics. Here, the authors introduce a vapour-phase synthesis of UiO-66 thin films, beginning with modulated atomic layer deposition of porous, amorphous films, followed by acetic acid vapour-enabled...
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| Autores principales: | , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2016
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/b253654bb1b54416adaaf0955073157f |
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| Sumario: | Thin films of metal-organic frameworks (MOFs) are promising for catalysis, gas storage, and microelectronics. Here, the authors introduce a vapour-phase synthesis of UiO-66 thin films, beginning with modulated atomic layer deposition of porous, amorphous films, followed by acetic acid vapour-enabled crystallization to the MOF structure. |
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