Turbomolecular pumps on conical active magnetic bearings

The adoption of magnetic levitation is experiencing a steady growth in the vacuum industry and, in particular, in turbomolecular pumps. Nowadays, the most common solutions for pumps of small and medium pumping capacity are based on hybrid architectures where passive magnetic bearings are combined to...

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Autores principales:	Angelo BONFITTO, Nicola AMATI, Lester D. SUAREZ, Andrea TONOLI
Formato:	article
Lenguaje:	EN
Publicado:	The Japan Society of Mechanical Engineers 2017
Materias:	turbomolecular pump conical amb vacuum three-phase Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/b8a8261a8f6a4cf29f3fb4f1a9db6453
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id	oai:doaj.org-article:b8a8261a8f6a4cf29f3fb4f1a9db6453
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spelling	oai:doaj.org-article:b8a8261a8f6a4cf29f3fb4f1a9db64532021-11-26T07:11:27ZTurbomolecular pumps on conical active magnetic bearings2187-974510.1299/mej.16-00569https://doaj.org/article/b8a8261a8f6a4cf29f3fb4f1a9db64532017-06-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/mej/4/5/4_16-00569/_pdf/-char/enhttps://doaj.org/toc/2187-9745The adoption of magnetic levitation is experiencing a steady growth in the vacuum industry and, in particular, in turbomolecular pumps. Nowadays, the most common solutions for pumps of small and medium pumping capacity are based on hybrid architectures where passive magnetic bearings are combined to ceramic ball bearings. By converse, fully active magnetic suspensions with cylindrical configuration represent the standard for medium to high pumping rate machines. Although simple, the cylindrical configuration is prone to drawbacks related in particular to the strains growing in the disc of the axial actuator that motivate the investigation of alternative architectures. As shown in previous literature, the use of conical configuration, besides compacting driving electronics, seems to be promising considering that the control of the radial and axial degree of freedom is performed simultaneously by the same devices acting in two actuation planes.This paper describes the development and the experimental characterization of a turbomolecular pump supported by conical active magnetic bearings. The control design is based on a SISO decentralized technique with position and control embedded loops. A rotor centering technique based on the characterization of the current loops is exposed. The external position loop is tuned by measuring relevant transfer functions to refine the controller and allow a safe critical speed crossing. The power actuation of the eight electromagnets is performed with a three-phase configuration drive technique instead of standard H-bridges to minimize the number of power switches. Experimental results along with numerical computations obtained with simulation models are reported as proof of the validity of the modeling approach and of the conical architecture effectiveness.Angelo BONFITTONicola AMATILester D. SUAREZAndrea TONOLIThe Japan Society of Mechanical Engineersarticleturbomolecularpumpconicalambvacuumthree-phaseMechanical engineering and machineryTJ1-1570ENMechanical Engineering Journal, Vol 4, Iss 5, Pp 16-00569-16-00569 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	turbomolecular pump conical amb vacuum three-phase Mechanical engineering and machinery TJ1-1570
spellingShingle	turbomolecular pump conical amb vacuum three-phase Mechanical engineering and machinery TJ1-1570 Angelo BONFITTO Nicola AMATI Lester D. SUAREZ Andrea TONOLI Turbomolecular pumps on conical active magnetic bearings
description	The adoption of magnetic levitation is experiencing a steady growth in the vacuum industry and, in particular, in turbomolecular pumps. Nowadays, the most common solutions for pumps of small and medium pumping capacity are based on hybrid architectures where passive magnetic bearings are combined to ceramic ball bearings. By converse, fully active magnetic suspensions with cylindrical configuration represent the standard for medium to high pumping rate machines. Although simple, the cylindrical configuration is prone to drawbacks related in particular to the strains growing in the disc of the axial actuator that motivate the investigation of alternative architectures. As shown in previous literature, the use of conical configuration, besides compacting driving electronics, seems to be promising considering that the control of the radial and axial degree of freedom is performed simultaneously by the same devices acting in two actuation planes.This paper describes the development and the experimental characterization of a turbomolecular pump supported by conical active magnetic bearings. The control design is based on a SISO decentralized technique with position and control embedded loops. A rotor centering technique based on the characterization of the current loops is exposed. The external position loop is tuned by measuring relevant transfer functions to refine the controller and allow a safe critical speed crossing. The power actuation of the eight electromagnets is performed with a three-phase configuration drive technique instead of standard H-bridges to minimize the number of power switches. Experimental results along with numerical computations obtained with simulation models are reported as proof of the validity of the modeling approach and of the conical architecture effectiveness.
format	article
author	Angelo BONFITTO Nicola AMATI Lester D. SUAREZ Andrea TONOLI
author_facet	Angelo BONFITTO Nicola AMATI Lester D. SUAREZ Andrea TONOLI
author_sort	Angelo BONFITTO
title	Turbomolecular pumps on conical active magnetic bearings
title_short	Turbomolecular pumps on conical active magnetic bearings
title_full	Turbomolecular pumps on conical active magnetic bearings
title_fullStr	Turbomolecular pumps on conical active magnetic bearings
title_full_unstemmed	Turbomolecular pumps on conical active magnetic bearings
title_sort	turbomolecular pumps on conical active magnetic bearings
publisher	The Japan Society of Mechanical Engineers
publishDate	2017
url	https://doaj.org/article/b8a8261a8f6a4cf29f3fb4f1a9db6453
work_keys_str_mv	AT angelobonfitto turbomolecularpumpsonconicalactivemagneticbearings AT nicolaamati turbomolecularpumpsonconicalactivemagneticbearings AT lesterdsuarez turbomolecularpumpsonconicalactivemagneticbearings AT andreatonoli turbomolecularpumpsonconicalactivemagneticbearings
_version_	1718409741651148800

Turbomolecular pumps on conical active magnetic bearings

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