Optical and surface energy probe of Hamaker constant in copper oxide thin films for NEMS and MEMS stiction control applications
Abstract Copper oxide films hold substantial promise as anti-stiction coatings in micro-electromechanical (MEMS) devices and with shrinking dimensions on the nanometre scale on nano electromechanical (NEMS) devices. The Hamaker constant will play a very significant role in understanding stiction and...
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| Main Authors: | , |
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| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/b91f70ee719f404f8ce7e9a80e1ed8c4 |
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