Optical and surface energy probe of Hamaker constant in copper oxide thin films for NEMS and MEMS stiction control applications

Abstract Copper oxide films hold substantial promise as anti-stiction coatings in micro-electromechanical (MEMS) devices and with shrinking dimensions on the nanometre scale on nano electromechanical (NEMS) devices. The Hamaker constant will play a very significant role in understanding stiction and...

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Autores principales: Abraham Ogwu, T. H. Darma
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2021
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Acceso en línea:https://doaj.org/article/b91f70ee719f404f8ce7e9a80e1ed8c4
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