The Influence of Design on Electrical Performance of AlGaN/GaN Lateral Schottky Barrier Diodes for Energy-Efficient Power Applications
In this paper, lateral AlGaN/GaN Schottky barrier diodes are investigated in terms of anode construction and diode structure. An original GaN Schottky diode manufacturing-process flow was developed. A set of experiments was carried out to verify dependences between electrical parameters of the diode...
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| Main Authors: | , , |
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| Format: | article |
| Language: | EN |
| Published: |
MDPI AG
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/b9a9cf6c73fa462981cb082fbc22feb4 |
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| Summary: | In this paper, lateral AlGaN/GaN Schottky barrier diodes are investigated in terms of anode construction and diode structure. An original GaN Schottky diode manufacturing-process flow was developed. A set of experiments was carried out to verify dependences between electrical parameters of the diode, such as reverse and forward currents, ON-state voltage, forward voltage and capacitance, anode-to-cathode distance, length of field plate, anode length, Schottky contact material, subanode recess depth, and epitaxial structure type. It was found that diodes of SiN/Al<sub>0.23</sub>Ga<sub>0.77</sub>N/GaN epi structure with Ni-based anodes demonstrated two orders of magnitude lower reverse currents than diodes with GaN/Al<sub>0.25</sub>Ga<sub>0.75</sub>N/GaN epitaxial structure. Diodes with Ni-based anodes demonstrated lower V<sub>ON</sub> and higher I<sub>F</sub> compared with diodes with Pt-based anodes. As a result of these investigations, an optimal set of parameters was selected, providing the following electrical characteristics: V<sub>ON</sub> = 0.6 (at I<sub>F</sub> = 1 mA/mm), forward voltage of the diode V<sub>F</sub> = 1.6 V (at I<sub>F</sub> = 100 mA/mm), maximum reverse voltage V<sub>R</sub> = 300 V, reverse leakage current I<sub>R</sub> = 0.04 μA/mm (at V<sub>R</sub> = −200 V), and total capacitance C = 3.6 pF/mm (at f = 1 MHz and 0 V DC bias). Obtained electrical characteristics of the lateral Schottky barrier diode demonstrate great potential for use in energy-efficient power applications, such as 5G multiband and multistandard wireless base stations. |
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