Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy

The importance of high dielectric constant materials in the development of high frequency nano-electronic devices is undeniable. Their polarization properties are directly dependent on the value of their relative permittivity. We report here on the nanoscale metrological quantification of the dielec...

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Autores principales:	Damien Richert, José Morán-Meza, Khaled Kaja, Alexandra Delvallée, Djamel Allal, Brice Gautier, François Piquemal
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	dielectric constant high-κ dielectric least square adjustment method micrometer-sized capacitor nanoscale capacitance measurements PMN-PT Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/ba57fd9643974cc3b3795bd8018b788a
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spelling	oai:doaj.org-article:ba57fd9643974cc3b3795bd8018b788a2021-11-25T18:32:29ZTraceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy10.3390/nano111131042079-4991https://doaj.org/article/ba57fd9643974cc3b3795bd8018b788a2021-11-01T00:00:00Zhttps://www.mdpi.com/2079-4991/11/11/3104https://doaj.org/toc/2079-4991The importance of high dielectric constant materials in the development of high frequency nano-electronic devices is undeniable. Their polarization properties are directly dependent on the value of their relative permittivity. We report here on the nanoscale metrological quantification of the dielectric constants of two high-κ materials, lead zirconate titanate (PZT) and lead magnesium niobate-lead titanate (PMN-PT), in the GHz range using scanning microwave microscopy (SMM). We demonstrate the importance of the capacitance calibration procedure and dimensional measurements on the weight of the combined relative uncertainties. A novel approach is proposed to correct lateral dimension measurements of micro-capacitive structures using the microwave electrical signatures, especially for rough surfaces of high-κ materials. A new analytical expression is also given for the capacitance calculations, taking into account the contribution of fringing electric fields. We determine the dielectric constant values ε<sub>PZT</sub> = 445 and ε<sub>PMN-PT</sub> = 641 at the frequency around 3.6 GHz, with combined relative uncertainties of 3.5% and 6.9% for PZT and PMN-PT, respectively. This work provides a general description of the metrological path for a quantified measurement of high dielectric constants with well-controlled low uncertainty levels.Damien RichertJosé Morán-MezaKhaled KajaAlexandra DelvalléeDjamel AllalBrice GautierFrançois PiquemalMDPI AGarticledielectric constanthigh-κ dielectricleast square adjustment methodmicrometer-sized capacitornanoscale capacitance measurementsPMN-PTChemistryQD1-999ENNanomaterials, Vol 11, Iss 3104, p 3104 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	dielectric constant high-κ dielectric least square adjustment method micrometer-sized capacitor nanoscale capacitance measurements PMN-PT Chemistry QD1-999
spellingShingle	dielectric constant high-κ dielectric least square adjustment method micrometer-sized capacitor nanoscale capacitance measurements PMN-PT Chemistry QD1-999 Damien Richert José Morán-Meza Khaled Kaja Alexandra Delvallée Djamel Allal Brice Gautier François Piquemal Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy
description	The importance of high dielectric constant materials in the development of high frequency nano-electronic devices is undeniable. Their polarization properties are directly dependent on the value of their relative permittivity. We report here on the nanoscale metrological quantification of the dielectric constants of two high-κ materials, lead zirconate titanate (PZT) and lead magnesium niobate-lead titanate (PMN-PT), in the GHz range using scanning microwave microscopy (SMM). We demonstrate the importance of the capacitance calibration procedure and dimensional measurements on the weight of the combined relative uncertainties. A novel approach is proposed to correct lateral dimension measurements of micro-capacitive structures using the microwave electrical signatures, especially for rough surfaces of high-κ materials. A new analytical expression is also given for the capacitance calculations, taking into account the contribution of fringing electric fields. We determine the dielectric constant values ε<sub>PZT</sub> = 445 and ε<sub>PMN-PT</sub> = 641 at the frequency around 3.6 GHz, with combined relative uncertainties of 3.5% and 6.9% for PZT and PMN-PT, respectively. This work provides a general description of the metrological path for a quantified measurement of high dielectric constants with well-controlled low uncertainty levels.
format	article
author	Damien Richert José Morán-Meza Khaled Kaja Alexandra Delvallée Djamel Allal Brice Gautier François Piquemal
author_facet	Damien Richert José Morán-Meza Khaled Kaja Alexandra Delvallée Djamel Allal Brice Gautier François Piquemal
author_sort	Damien Richert
title	Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy
title_short	Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy
title_full	Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy
title_fullStr	Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy
title_full_unstemmed	Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy
title_sort	traceable nanoscale measurements of high dielectric constant by scanning microwave microscopy
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/ba57fd9643974cc3b3795bd8018b788a
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_version_	1718411040461422592

Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy

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