Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy
The importance of high dielectric constant materials in the development of high frequency nano-electronic devices is undeniable. Their polarization properties are directly dependent on the value of their relative permittivity. We report here on the nanoscale metrological quantification of the dielec...
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
MDPI AG
2021
|
| Subjects: | |
| Online Access: | https://doaj.org/article/ba57fd9643974cc3b3795bd8018b788a |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|