Research Paper: X-ray Photoelectron Spectroscopy of TiO2 Optical Thin Films at Managed Annealing Process

Titanium dioxide (TiO2) is widely used in optical coating technology because of its stability and high index of refraction. The homogeneity of the chemical composition (stoichiometry) of the optical thin films plays an important role in the quality of the layers. Increasing the homogeneity increases...

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Autores principales:	Alireza Bananej, Zohreh Parsa, Mahdieh Khatiri, Hadi Adelkhani
Formato:	article
Lenguaje:	FA
Publicado:	Alzahra University 2021
Materias:	thin film x-ray photoelectron spectroscopy heat treatment stoichiometry Physics QC1-999
Acceso en línea:	https://doaj.org/article/bb12b3482447450082c57d2e25e7afe1
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spelling	oai:doaj.org-article:bb12b3482447450082c57d2e25e7afe12021-12-02T07:54:27ZResearch Paper: X-ray Photoelectron Spectroscopy of TiO2 Optical Thin Films at Managed Annealing Process2783-10432783-105110.22051/ijap.2021.36513.1215https://doaj.org/article/bb12b3482447450082c57d2e25e7afe12021-09-01T00:00:00Zhttps://jap.alzahra.ac.ir/article_5978_5319bbfd21e8966a1c8817a264eaa9fb.pdfhttps://doaj.org/toc/2783-1043https://doaj.org/toc/2783-1051Titanium dioxide (TiO2) is widely used in optical coating technology because of its stability and high index of refraction. The homogeneity of the chemical composition (stoichiometry) of the optical thin films plays an important role in the quality of the layers. Increasing the homogeneity increases the transmission coefficient and the laser-induced damage threshold and decreases the absorption coefficient. To increase the homogeneity of the layers, various methods are used during and after the process of film coating. Annealing (heating the deposited films up to a certain temperature) is a common technique. After the coating process, TiO2 thin film is uniformly heated to 400 °C to obtain the homogenization of the stoichiometry. In this research, the dependence of the homogeneity of the stoichiometry of TiO2 optical thin films on the rate of heat treatment (a gradual increase of heat treatment temperature over time) is investigated by X-ray Photoelectron Spectroscopy (XPS) of the samples. So, the 400 nm thick TiO2 layers are coated on the BK7 optical glass, utilizing an electron gun. Then, each sample is subjected to heat treatment at different rates. The data obtained from the XPS analysis show that the samples subjected to slow heat treatment (2.2 °C per minute, up to a final temperature of 400 °C) have a more homogeneous stoichiometry and contain higher amounts of TiO2. Based on the results, the laser-induced damage threshold of laser mirrors can be improved in the nanosecond and femtosecond regimes of radiation.Alireza BananejZohreh ParsaMahdieh KhatiriHadi AdelkhaniAlzahra Universityarticlethin filmx-ray photoelectron spectroscopyheat treatmentstoichiometryPhysicsQC1-999FAفیزیک کاربردی ایران, Vol 11, Iss 3, Pp 7-14 (2021)
institution	DOAJ
collection	DOAJ
language	FA
topic	thin film x-ray photoelectron spectroscopy heat treatment stoichiometry Physics QC1-999
spellingShingle	thin film x-ray photoelectron spectroscopy heat treatment stoichiometry Physics QC1-999 Alireza Bananej Zohreh Parsa Mahdieh Khatiri Hadi Adelkhani Research Paper: X-ray Photoelectron Spectroscopy of TiO2 Optical Thin Films at Managed Annealing Process
description	Titanium dioxide (TiO2) is widely used in optical coating technology because of its stability and high index of refraction. The homogeneity of the chemical composition (stoichiometry) of the optical thin films plays an important role in the quality of the layers. Increasing the homogeneity increases the transmission coefficient and the laser-induced damage threshold and decreases the absorption coefficient. To increase the homogeneity of the layers, various methods are used during and after the process of film coating. Annealing (heating the deposited films up to a certain temperature) is a common technique. After the coating process, TiO2 thin film is uniformly heated to 400 °C to obtain the homogenization of the stoichiometry. In this research, the dependence of the homogeneity of the stoichiometry of TiO2 optical thin films on the rate of heat treatment (a gradual increase of heat treatment temperature over time) is investigated by X-ray Photoelectron Spectroscopy (XPS) of the samples. So, the 400 nm thick TiO2 layers are coated on the BK7 optical glass, utilizing an electron gun. Then, each sample is subjected to heat treatment at different rates. The data obtained from the XPS analysis show that the samples subjected to slow heat treatment (2.2 °C per minute, up to a final temperature of 400 °C) have a more homogeneous stoichiometry and contain higher amounts of TiO2. Based on the results, the laser-induced damage threshold of laser mirrors can be improved in the nanosecond and femtosecond regimes of radiation.
format	article
author	Alireza Bananej Zohreh Parsa Mahdieh Khatiri Hadi Adelkhani
author_facet	Alireza Bananej Zohreh Parsa Mahdieh Khatiri Hadi Adelkhani
author_sort	Alireza Bananej
title	Research Paper: X-ray Photoelectron Spectroscopy of TiO2 Optical Thin Films at Managed Annealing Process
title_short	Research Paper: X-ray Photoelectron Spectroscopy of TiO2 Optical Thin Films at Managed Annealing Process
title_full	Research Paper: X-ray Photoelectron Spectroscopy of TiO2 Optical Thin Films at Managed Annealing Process
title_fullStr	Research Paper: X-ray Photoelectron Spectroscopy of TiO2 Optical Thin Films at Managed Annealing Process
title_full_unstemmed	Research Paper: X-ray Photoelectron Spectroscopy of TiO2 Optical Thin Films at Managed Annealing Process
title_sort	research paper: x-ray photoelectron spectroscopy of tio2 optical thin films at managed annealing process
publisher	Alzahra University
publishDate	2021
url	https://doaj.org/article/bb12b3482447450082c57d2e25e7afe1
work_keys_str_mv	AT alirezabananej researchpaperxrayphotoelectronspectroscopyoftio2opticalthinfilmsatmanagedannealingprocess AT zohrehparsa researchpaperxrayphotoelectronspectroscopyoftio2opticalthinfilmsatmanagedannealingprocess AT mahdiehkhatiri researchpaperxrayphotoelectronspectroscopyoftio2opticalthinfilmsatmanagedannealingprocess AT hadiadelkhani researchpaperxrayphotoelectronspectroscopyoftio2opticalthinfilmsatmanagedannealingprocess
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Research Paper: X-ray Photoelectron Spectroscopy of TiO2 Optical Thin Films at Managed Annealing Process

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