Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing

Recently, optical sensors interacting with evanescent fields and the external environment around waveguides have attracted extensive attention. In the process of light propagation in the waveguide, the depth of the evanescent field is closely related to the accuracy of the optical sensor, and adjust...

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Autores principales:	Zong-Da Zhang, Yan-Zhao Duan, Qi Guo, Si Gao, Bing-Rong Gao
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	femtosecond laser waveguide index sensor Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/bda804c0bbeb4fe9b08e9559acff0b06
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spelling	oai:doaj.org-article:bda804c0bbeb4fe9b08e9559acff0b062021-11-25T18:23:52ZEvanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing10.3390/mi121114212072-666Xhttps://doaj.org/article/bda804c0bbeb4fe9b08e9559acff0b062021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1421https://doaj.org/toc/2072-666XRecently, optical sensors interacting with evanescent fields and the external environment around waveguides have attracted extensive attention. In the process of light propagation in the waveguide, the depth of the evanescent field is closely related to the accuracy of the optical sensor, and adjusting the depth of the evanescent field to obtain higher accuracy has become the primary challenge in fabricating on-chip optical sensors. In this study, the waveguide structure of a Mach–Zehnder interferometer was written directly in Corning Eagle 2000 borosilicate glass by a femtosecond laser, and the sensing window was exposed out of the bulk material by mechanical polishing. The refractive index detection device based on the proposed on-chip Mach–Zehnder interferometer has the advantages of small volume, light weight, and good stability. Its sensitivity can reach 206 nm/RIU or 337 dB/RIU, and the theoretical maximum measurement range is 1–1.508. Therefore, it can measure the refractive index quickly and accurately in extreme or complex environments, and has excellent application prospects.Zong-Da ZhangYan-Zhao DuanQi GuoSi GaoBing-Rong GaoMDPI AGarticlefemtosecond laserwaveguideindex sensorMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1421, p 1421 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	femtosecond laser waveguide index sensor Mechanical engineering and machinery TJ1-1570
spellingShingle	femtosecond laser waveguide index sensor Mechanical engineering and machinery TJ1-1570 Zong-Da Zhang Yan-Zhao Duan Qi Guo Si Gao Bing-Rong Gao Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing
description	Recently, optical sensors interacting with evanescent fields and the external environment around waveguides have attracted extensive attention. In the process of light propagation in the waveguide, the depth of the evanescent field is closely related to the accuracy of the optical sensor, and adjusting the depth of the evanescent field to obtain higher accuracy has become the primary challenge in fabricating on-chip optical sensors. In this study, the waveguide structure of a Mach–Zehnder interferometer was written directly in Corning Eagle 2000 borosilicate glass by a femtosecond laser, and the sensing window was exposed out of the bulk material by mechanical polishing. The refractive index detection device based on the proposed on-chip Mach–Zehnder interferometer has the advantages of small volume, light weight, and good stability. Its sensitivity can reach 206 nm/RIU or 337 dB/RIU, and the theoretical maximum measurement range is 1–1.508. Therefore, it can measure the refractive index quickly and accurately in extreme or complex environments, and has excellent application prospects.
format	article
author	Zong-Da Zhang Yan-Zhao Duan Qi Guo Si Gao Bing-Rong Gao
author_facet	Zong-Da Zhang Yan-Zhao Duan Qi Guo Si Gao Bing-Rong Gao
author_sort	Zong-Da Zhang
title	Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing
title_short	Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing
title_full	Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing
title_fullStr	Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing
title_full_unstemmed	Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing
title_sort	evanescent field controllable mz sensor via femtosecond laser processing and mechanic polishing
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/bda804c0bbeb4fe9b08e9559acff0b06
work_keys_str_mv	AT zongdazhang evanescentfieldcontrollablemzsensorviafemtosecondlaserprocessingandmechanicpolishing AT yanzhaoduan evanescentfieldcontrollablemzsensorviafemtosecondlaserprocessingandmechanicpolishing AT qiguo evanescentfieldcontrollablemzsensorviafemtosecondlaserprocessingandmechanicpolishing AT sigao evanescentfieldcontrollablemzsensorviafemtosecondlaserprocessingandmechanicpolishing AT bingronggao evanescentfieldcontrollablemzsensorviafemtosecondlaserprocessingandmechanicpolishing
_version_	1718411221821030400

Evanescent Field Controllable MZ Sensor via Femtosecond Laser Processing and Mechanic Polishing

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