Rapid fabrication of complex nanostructures using room-temperature ultrasonic nanoimprinting
Nanoimprinting faces challenges with imprinting hard materials at low or room temperature, and with fabricating complex nanostructures rapidly. Here, the authors overcome these challenges by a room-temperature ultrasonic nanoimprinting technique that capitalizes on the concentration of ultrasonic en...
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| Auteurs principaux: | , , , , , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Nature Portfolio
2021
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/be44c8facc2c410296dce45a24f14f08 |
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