Detecting Small Size Mass Loading Using Transversely Coupled SAW Resonator
In the detection of small size mass loading, such as a single cell, a micro droplet or an aerosol particle, the sensors with longitudinally coupled surface acoustic wave resonator (LC-SAWR) structure can hardly avoid waveform distortions. The relative size of mass loading to the sensitive surface of...
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MDPI AG
2021
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oai:doaj.org-article:c001447f156840a7b6c8559d48b489192021-11-11T15:16:38ZDetecting Small Size Mass Loading Using Transversely Coupled SAW Resonator10.3390/app1121102282076-3417https://doaj.org/article/c001447f156840a7b6c8559d48b489192021-11-01T00:00:00Zhttps://www.mdpi.com/2076-3417/11/21/10228https://doaj.org/toc/2076-3417In the detection of small size mass loading, such as a single cell, a micro droplet or an aerosol particle, the sensors with longitudinally coupled surface acoustic wave resonator (LC-SAWR) structure can hardly avoid waveform distortions. The relative size of mass loading to the sensitive surface of the detector is the main factor affecting the response of LC-SAWR. The smaller the relative size, the worse the waveform distortion. In order to avoid influences from the mass loading’s size, in this paper, a transversely coupled SAW resonator (TC-SAWR) was proposed in order to achieve high performance in sensing small size mass loadings. For the design and simulation of TC-SAWR, the two-dimensional coupling of model (2D-COM) theory and finite element method (FEM) were used in this work. In the experiment, SiO<sub>2</sub> was deposited on the sensor’s surface as a small size mass loading. The results from simulation and experiment mutually demonstrated the advantage of TC-SAWR to conquer waveform distortion in the detection of small size mass loading.Ran YouJiuling LiuMinghua LiuYuxiang ZhangZhiyuan ChenShitang HeMDPI AGarticlesurface acoustic wavesmall size loadbiochemical sensorswaveform distortion2D-COM theoryFEM simulationTechnologyTEngineering (General). Civil engineering (General)TA1-2040Biology (General)QH301-705.5PhysicsQC1-999ChemistryQD1-999ENApplied Sciences, Vol 11, Iss 10228, p 10228 (2021) |
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surface acoustic wave small size load biochemical sensors waveform distortion 2D-COM theory FEM simulation Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999 |
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surface acoustic wave small size load biochemical sensors waveform distortion 2D-COM theory FEM simulation Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999 Ran You Jiuling Liu Minghua Liu Yuxiang Zhang Zhiyuan Chen Shitang He Detecting Small Size Mass Loading Using Transversely Coupled SAW Resonator |
description |
In the detection of small size mass loading, such as a single cell, a micro droplet or an aerosol particle, the sensors with longitudinally coupled surface acoustic wave resonator (LC-SAWR) structure can hardly avoid waveform distortions. The relative size of mass loading to the sensitive surface of the detector is the main factor affecting the response of LC-SAWR. The smaller the relative size, the worse the waveform distortion. In order to avoid influences from the mass loading’s size, in this paper, a transversely coupled SAW resonator (TC-SAWR) was proposed in order to achieve high performance in sensing small size mass loadings. For the design and simulation of TC-SAWR, the two-dimensional coupling of model (2D-COM) theory and finite element method (FEM) were used in this work. In the experiment, SiO<sub>2</sub> was deposited on the sensor’s surface as a small size mass loading. The results from simulation and experiment mutually demonstrated the advantage of TC-SAWR to conquer waveform distortion in the detection of small size mass loading. |
format |
article |
author |
Ran You Jiuling Liu Minghua Liu Yuxiang Zhang Zhiyuan Chen Shitang He |
author_facet |
Ran You Jiuling Liu Minghua Liu Yuxiang Zhang Zhiyuan Chen Shitang He |
author_sort |
Ran You |
title |
Detecting Small Size Mass Loading Using Transversely Coupled SAW Resonator |
title_short |
Detecting Small Size Mass Loading Using Transversely Coupled SAW Resonator |
title_full |
Detecting Small Size Mass Loading Using Transversely Coupled SAW Resonator |
title_fullStr |
Detecting Small Size Mass Loading Using Transversely Coupled SAW Resonator |
title_full_unstemmed |
Detecting Small Size Mass Loading Using Transversely Coupled SAW Resonator |
title_sort |
detecting small size mass loading using transversely coupled saw resonator |
publisher |
MDPI AG |
publishDate |
2021 |
url |
https://doaj.org/article/c001447f156840a7b6c8559d48b48919 |
work_keys_str_mv |
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1718435778919399424 |