Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors

Abstract In this study, CeO2 pH-sensitive sensing membranes in electrolyte-insulator-semiconductor structures on silicon substrate were fabricated. To enhance sensing performance, the membrane underwent Ti doping and NH3 plasma treatment on the surface. To examine the effects of Ti doping and plasma...

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Autores principales:	Chyuan-Haur Kao, Che-Wei Chang, Yu Tzu Chen, Wei Ming Su, Chien Cheng Lu, Chan-Yu Lin, Hsiang Chen
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/c0905ef5c2dc478d97783c793d14d9d9
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spelling	oai:doaj.org-article:c0905ef5c2dc478d97783c793d14d9d92021-12-02T15:05:47ZInfluence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors10.1038/s41598-017-02692-22045-2322https://doaj.org/article/c0905ef5c2dc478d97783c793d14d9d92017-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-02692-2https://doaj.org/toc/2045-2322Abstract In this study, CeO2 pH-sensitive sensing membranes in electrolyte-insulator-semiconductor structures on silicon substrate were fabricated. To enhance sensing performance, the membrane underwent Ti doping and NH3 plasma treatment on the surface. To examine the effects of Ti doping and plasma treatment, multiple material properties evaluations were conducted using field-emission scanning electron microscopy, X-ray diffraction, atomic force microscopy, and secondary ion mass spectroscopy. Results indicate that Ti doping and plasma treatment can remove defects and enhance crystallization, thereby achieving improved pH-sensing performance of the membrane with high sensitivity, high linearity, low hysteresis voltage and low drift voltage. CeO2-based EIS membranes with Ti doping and NH3 plasma treatment show promise for future portable pH-sensitive biosensors.Chyuan-Haur KaoChe-Wei ChangYu Tzu ChenWei Ming SuChien Cheng LuChan-Yu LinHsiang ChenNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-9 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Chyuan-Haur Kao Che-Wei Chang Yu Tzu Chen Wei Ming Su Chien Cheng Lu Chan-Yu Lin Hsiang Chen Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors
description	Abstract In this study, CeO2 pH-sensitive sensing membranes in electrolyte-insulator-semiconductor structures on silicon substrate were fabricated. To enhance sensing performance, the membrane underwent Ti doping and NH3 plasma treatment on the surface. To examine the effects of Ti doping and plasma treatment, multiple material properties evaluations were conducted using field-emission scanning electron microscopy, X-ray diffraction, atomic force microscopy, and secondary ion mass spectroscopy. Results indicate that Ti doping and plasma treatment can remove defects and enhance crystallization, thereby achieving improved pH-sensing performance of the membrane with high sensitivity, high linearity, low hysteresis voltage and low drift voltage. CeO2-based EIS membranes with Ti doping and NH3 plasma treatment show promise for future portable pH-sensitive biosensors.
format	article
author	Chyuan-Haur Kao Che-Wei Chang Yu Tzu Chen Wei Ming Su Chien Cheng Lu Chan-Yu Lin Hsiang Chen
author_facet	Chyuan-Haur Kao Che-Wei Chang Yu Tzu Chen Wei Ming Su Chien Cheng Lu Chan-Yu Lin Hsiang Chen
author_sort	Chyuan-Haur Kao
title	Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors
title_short	Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors
title_full	Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors
title_fullStr	Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors
title_full_unstemmed	Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors
title_sort	influence of nh3 plasma and ti doping on ph-sensitive ceo2 electrolyte-insulator-semiconductor biosensors
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/c0905ef5c2dc478d97783c793d14d9d9
work_keys_str_mv	AT chyuanhaurkao influenceofnh3plasmaandtidopingonphsensitiveceo2electrolyteinsulatorsemiconductorbiosensors AT cheweichang influenceofnh3plasmaandtidopingonphsensitiveceo2electrolyteinsulatorsemiconductorbiosensors AT yutzuchen influenceofnh3plasmaandtidopingonphsensitiveceo2electrolyteinsulatorsemiconductorbiosensors AT weimingsu influenceofnh3plasmaandtidopingonphsensitiveceo2electrolyteinsulatorsemiconductorbiosensors AT chienchenglu influenceofnh3plasmaandtidopingonphsensitiveceo2electrolyteinsulatorsemiconductorbiosensors AT chanyulin influenceofnh3plasmaandtidopingonphsensitiveceo2electrolyteinsulatorsemiconductorbiosensors AT hsiangchen influenceofnh3plasmaandtidopingonphsensitiveceo2electrolyteinsulatorsemiconductorbiosensors
_version_	1718388730809548800

Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors

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