Elliptic Arc Fitting for the Shape Control System of Silicon Single Crystal Growth
In the vision-based shape control system of silicon single crystal (SSC) growth, shape parameters are used as the control variables to make the grown SSC approximate to a perfect cylinder. A highlight halo at the junction of the solid crystal and the liquid crysta is a distinctive feature that refle...
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| Auteurs principaux: | , |
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| Format: | article |
| Langue: | EN |
| Publié: |
IEEE
2020
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/c09fc3e15d2d4521b6b6c2cd194ae970 |
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