Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon

Abstract The phase velocity dispersion of the surface acoustic waves on a basal plane of Si(100) has been calculated in the whole range of the azimuthal angle of propagation. We present a detailed description of the calculations. These calculations are compared with the experimental data obtained by...

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Autores principales: Alexander Tarasenko, Radim Čtvrtlík, Radim Kudělka
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2021
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Acceso en línea:https://doaj.org/article/c1c0d542bf6b4807ad551b84da1a0d14
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