Thermo-Optic Phase Tuners Analysis and Design for Process Modules on a Silicon Nitride Platform
In this paper, we present a systematic design for manufacturing analysis for thermo-optic phase tuners, framed within the process modules available on a silicon nitride platform. Departing from an established technology platform, the heat distribution in various micro-structures was analyzed, both i...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
MDPI AG
2021
|
| Subjects: | |
| Online Access: | https://doaj.org/article/c43a7a0b733d4ad38552baa6cb5d02f1 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|