Photoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning

Cellulose is a glucose polymer and the most abundant biological material on earth. Because it is biodegradable and yet water insoluble, cellulose has been pursued in the past as a scaffold or base structural material for medical applications, sensors, and optical devices. Patterning of two cellulose...

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Autores principales:	Andrey E. Mironov, Sehyun Park, Jinhong Kim, Dane J. Sievers, Sung-Jin Park, Stephan Spirk, J. Gary Eden
Formato:	article
Lenguaje:	EN
Publicado:	AIP Publishing LLC 2021
Materias:	Biotechnology TP248.13-248.65 Physics QC1-999
Acceso en línea:	https://doaj.org/article/c4a75d638d9a442bb87cce35a4b37096
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id	oai:doaj.org-article:c4a75d638d9a442bb87cce35a4b37096
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spelling	oai:doaj.org-article:c4a75d638d9a442bb87cce35a4b370962021-12-01T18:51:24ZPhotoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning2166-532X10.1063/5.0065511https://doaj.org/article/c4a75d638d9a442bb87cce35a4b370962021-11-01T00:00:00Zhttp://dx.doi.org/10.1063/5.0065511https://doaj.org/toc/2166-532XCellulose is a glucose polymer and the most abundant biological material on earth. Because it is biodegradable and yet water insoluble, cellulose has been pursued in the past as a scaffold or base structural material for medical applications, sensors, and optical devices. Patterning of two cellulose polymers, cellulose acetate and cellulose acetate butyrate, by photoablative lithography at 172 nm has been demonstrated and is reported here. This 3D subtractive process yields complex micro- and nanostructures and optical components, including sinusoidal gratings and waveguides. Having a depth precision of 15 nm and requiring no photoresist or solvents, vacuum-ultraviolet photoetching of cellulose polymer films proceeds at a constant rate of ∼0.8 μm/h for depths of up to and beyond 25 μm when the intensity of the flat lamp is 10 mW cm−2. A polydimethylsiloxane (PDMS) microimprinting process, in which photoetched cellulose serves as a negative master mold for PDMS, provides feature sizes as small as 0.5 μm and allows for optical structures such as gratings to be integrated with microfluidic devices while eliminating the existing necessity of fabricating Si molds in a cleanroom environment.Andrey E. MironovSehyun ParkJinhong KimDane J. SieversSung-Jin ParkStephan SpirkJ. Gary EdenAIP Publishing LLCarticleBiotechnologyTP248.13-248.65PhysicsQC1-999ENAPL Materials, Vol 9, Iss 11, Pp 111115-111115-7 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Biotechnology TP248.13-248.65 Physics QC1-999
spellingShingle	Biotechnology TP248.13-248.65 Physics QC1-999 Andrey E. Mironov Sehyun Park Jinhong Kim Dane J. Sievers Sung-Jin Park Stephan Spirk J. Gary Eden Photoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning
description	Cellulose is a glucose polymer and the most abundant biological material on earth. Because it is biodegradable and yet water insoluble, cellulose has been pursued in the past as a scaffold or base structural material for medical applications, sensors, and optical devices. Patterning of two cellulose polymers, cellulose acetate and cellulose acetate butyrate, by photoablative lithography at 172 nm has been demonstrated and is reported here. This 3D subtractive process yields complex micro- and nanostructures and optical components, including sinusoidal gratings and waveguides. Having a depth precision of 15 nm and requiring no photoresist or solvents, vacuum-ultraviolet photoetching of cellulose polymer films proceeds at a constant rate of ∼0.8 μm/h for depths of up to and beyond 25 μm when the intensity of the flat lamp is 10 mW cm−2. A polydimethylsiloxane (PDMS) microimprinting process, in which photoetched cellulose serves as a negative master mold for PDMS, provides feature sizes as small as 0.5 μm and allows for optical structures such as gratings to be integrated with microfluidic devices while eliminating the existing necessity of fabricating Si molds in a cleanroom environment.
format	article
author	Andrey E. Mironov Sehyun Park Jinhong Kim Dane J. Sievers Sung-Jin Park Stephan Spirk J. Gary Eden
author_facet	Andrey E. Mironov Sehyun Park Jinhong Kim Dane J. Sievers Sung-Jin Park Stephan Spirk J. Gary Eden
author_sort	Andrey E. Mironov
title	Photoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning
title_short	Photoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning
title_full	Photoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning
title_fullStr	Photoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning
title_full_unstemmed	Photoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning
title_sort	photoablative lithography of cellulose acetate at 172 nm: subtractive 3d printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning
publisher	AIP Publishing LLC
publishDate	2021
url	https://doaj.org/article/c4a75d638d9a442bb87cce35a4b37096
work_keys_str_mv	AT andreyemironov photoablativelithographyofcelluloseacetateat172nmsubtractive3dprintingofbiodegradableopticalmicrostructuresandmoldsforpolydimethylsiloxanepatterning AT sehyunpark photoablativelithographyofcelluloseacetateat172nmsubtractive3dprintingofbiodegradableopticalmicrostructuresandmoldsforpolydimethylsiloxanepatterning AT jinhongkim photoablativelithographyofcelluloseacetateat172nmsubtractive3dprintingofbiodegradableopticalmicrostructuresandmoldsforpolydimethylsiloxanepatterning AT danejsievers photoablativelithographyofcelluloseacetateat172nmsubtractive3dprintingofbiodegradableopticalmicrostructuresandmoldsforpolydimethylsiloxanepatterning AT sungjinpark photoablativelithographyofcelluloseacetateat172nmsubtractive3dprintingofbiodegradableopticalmicrostructuresandmoldsforpolydimethylsiloxanepatterning AT stephanspirk photoablativelithographyofcelluloseacetateat172nmsubtractive3dprintingofbiodegradableopticalmicrostructuresandmoldsforpolydimethylsiloxanepatterning AT jgaryeden photoablativelithographyofcelluloseacetateat172nmsubtractive3dprintingofbiodegradableopticalmicrostructuresandmoldsforpolydimethylsiloxanepatterning
_version_	1718404719243689984

Photoablative lithography of cellulose acetate at 172 nm: Subtractive 3D printing of biodegradable optical microstructures and molds for polydimethylsiloxane patterning

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