Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers

Abstract In this work we analyze GISAXS measurements of the structure factor of Si surfaces evolving during 1 keV Ar+ ion bombardment. Using newly-developed methods sensitive to the full range of experimentally-available wavenumbers q, we extract the linear amplification rate R(q) governing surface...

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Autores principales:	Scott A. Norris, Joy C. Perkinson, Mahsa Mokhtarzadeh, Eitan Anzenberg, Michael J. Aziz, Karl F. Ludwig
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/c8b23817e2504bc9bfe5290fd0990bb8
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spelling	oai:doaj.org-article:c8b23817e2504bc9bfe5290fd0990bb82021-12-02T11:52:35ZDistinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers10.1038/s41598-017-01059-x2045-2322https://doaj.org/article/c8b23817e2504bc9bfe5290fd0990bb82017-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-01059-xhttps://doaj.org/toc/2045-2322Abstract In this work we analyze GISAXS measurements of the structure factor of Si surfaces evolving during 1 keV Ar+ ion bombardment. Using newly-developed methods sensitive to the full range of experimentally-available wavenumbers q, we extract the linear amplification rate R(q) governing surface stability over a range of wavenumbers 4–5 times larger than has previously been obtained. Comparing with theoretical models also retaining full wavenumber-dependence, we find an excellent fit of the experimental data over the full range of irradiation angles and wavenumbers. Moreover, the fitted parameter values represent experimental evaluation of the magnitudes of most physical mechanisms currently believed to be important to the pattern-formation process. In all cases, the extracted values agree well with direct observations or atomistic simulations of the same quantities, suggesting that GISAXS analysis may allow more powerful comparison between experiment and theory than had previously been thought.Scott A. NorrisJoy C. PerkinsonMahsa MokhtarzadehEitan AnzenbergMichael J. AzizKarl F. LudwigNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-12 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Scott A. Norris Joy C. Perkinson Mahsa Mokhtarzadeh Eitan Anzenberg Michael J. Aziz Karl F. Ludwig Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers
description	Abstract In this work we analyze GISAXS measurements of the structure factor of Si surfaces evolving during 1 keV Ar+ ion bombardment. Using newly-developed methods sensitive to the full range of experimentally-available wavenumbers q, we extract the linear amplification rate R(q) governing surface stability over a range of wavenumbers 4–5 times larger than has previously been obtained. Comparing with theoretical models also retaining full wavenumber-dependence, we find an excellent fit of the experimental data over the full range of irradiation angles and wavenumbers. Moreover, the fitted parameter values represent experimental evaluation of the magnitudes of most physical mechanisms currently believed to be important to the pattern-formation process. In all cases, the extracted values agree well with direct observations or atomistic simulations of the same quantities, suggesting that GISAXS analysis may allow more powerful comparison between experiment and theory than had previously been thought.
format	article
author	Scott A. Norris Joy C. Perkinson Mahsa Mokhtarzadeh Eitan Anzenberg Michael J. Aziz Karl F. Ludwig
author_facet	Scott A. Norris Joy C. Perkinson Mahsa Mokhtarzadeh Eitan Anzenberg Michael J. Aziz Karl F. Ludwig
author_sort	Scott A. Norris
title	Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers
title_short	Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers
title_full	Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers
title_fullStr	Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers
title_full_unstemmed	Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers
title_sort	distinguishing physical mechanisms using gisaxs experiments and linear theory: the importance of high wavenumbers
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/c8b23817e2504bc9bfe5290fd0990bb8
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Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers

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