Lateral resolution limit of laser Doppler vibrometer microscopes for the measurement of surface acoustic waves
Abstract The lateral or transverse resolution of single-point interferometers for vibration measurement is especially critical for microelectromechanical systems (MEMS) vibrating up to the gigahertz range. In this regime, the acoustic wavelengths are typically in the range of the size of the laser f...
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| Autores principales: | , |
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| Formato: | article |
| Lenguaje: | EN |
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Nature Portfolio
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/c9cd1bdb49f84c189b163314fb6432ec |
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