On the mechanism of carrier recombination in downsized blue micro-LEDs

Abstract The mechanism of carrier recombination in downsized μ-LED chips from 100 × 100 to 10 × 10 μm2 on emission performance was systemically investigated. All photolithography processes for defining the μ-LED pattern were achieved by using a laser direct writing technique. This maskless technolog...

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Autores principales:	Po-Wei Chen, Po-Wen Hsiao, Hsuan-Jen Chen, Bo-Sheng Lee, Kai-Ping Chang, Chao-Chun Yen, Ray-Hua Horng, Dong-Sing Wuu
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/ca59de586c984864bf45bd195eede79b
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spelling	oai:doaj.org-article:ca59de586c984864bf45bd195eede79b2021-11-28T12:19:56ZOn the mechanism of carrier recombination in downsized blue micro-LEDs10.1038/s41598-021-02293-02045-2322https://doaj.org/article/ca59de586c984864bf45bd195eede79b2021-11-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-02293-0https://doaj.org/toc/2045-2322Abstract The mechanism of carrier recombination in downsized μ-LED chips from 100 × 100 to 10 × 10 μm2 on emission performance was systemically investigated. All photolithography processes for defining the μ-LED pattern were achieved by using a laser direct writing technique. This maskless technology achieved the glass-mask-free process, which not only can improve the exposure accuracy but also save the development time. The multi-functional SiO2 film as a passivation layer successfully reduced the leakage current density of μ-LED chips compared with the μ-LED chips without passivation layer. As decreasing the chip size to 10 × 10 μm2, the smallest chip size exhibited the highest ideality factor, which indicated the main carrier recombination at the high-defect-density zone in μ-LED chip leading to the decreased emission performance. The blue-shift phenomenon in the electroluminescence spectrum with decreasing the μ-LED chip size was due to the carrier screening effect and the band filling effect. The 10 × 10 μm2 μ-LED chip exhibited high EQE values in the high current density region with a less efficiency droop, and the max-EQE value was 18.8%. The luminance of 96 × 48 μ-LED array with the chip size of 20 × 20 μm2 exhibited a high value of 516 nits at the voltage of 3 V.Po-Wei ChenPo-Wen HsiaoHsuan-Jen ChenBo-Sheng LeeKai-Ping ChangChao-Chun YenRay-Hua HorngDong-Sing WuuNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-8 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Po-Wei Chen Po-Wen Hsiao Hsuan-Jen Chen Bo-Sheng Lee Kai-Ping Chang Chao-Chun Yen Ray-Hua Horng Dong-Sing Wuu On the mechanism of carrier recombination in downsized blue micro-LEDs
description	Abstract The mechanism of carrier recombination in downsized μ-LED chips from 100 × 100 to 10 × 10 μm2 on emission performance was systemically investigated. All photolithography processes for defining the μ-LED pattern were achieved by using a laser direct writing technique. This maskless technology achieved the glass-mask-free process, which not only can improve the exposure accuracy but also save the development time. The multi-functional SiO2 film as a passivation layer successfully reduced the leakage current density of μ-LED chips compared with the μ-LED chips without passivation layer. As decreasing the chip size to 10 × 10 μm2, the smallest chip size exhibited the highest ideality factor, which indicated the main carrier recombination at the high-defect-density zone in μ-LED chip leading to the decreased emission performance. The blue-shift phenomenon in the electroluminescence spectrum with decreasing the μ-LED chip size was due to the carrier screening effect and the band filling effect. The 10 × 10 μm2 μ-LED chip exhibited high EQE values in the high current density region with a less efficiency droop, and the max-EQE value was 18.8%. The luminance of 96 × 48 μ-LED array with the chip size of 20 × 20 μm2 exhibited a high value of 516 nits at the voltage of 3 V.
format	article
author	Po-Wei Chen Po-Wen Hsiao Hsuan-Jen Chen Bo-Sheng Lee Kai-Ping Chang Chao-Chun Yen Ray-Hua Horng Dong-Sing Wuu
author_facet	Po-Wei Chen Po-Wen Hsiao Hsuan-Jen Chen Bo-Sheng Lee Kai-Ping Chang Chao-Chun Yen Ray-Hua Horng Dong-Sing Wuu
author_sort	Po-Wei Chen
title	On the mechanism of carrier recombination in downsized blue micro-LEDs
title_short	On the mechanism of carrier recombination in downsized blue micro-LEDs
title_full	On the mechanism of carrier recombination in downsized blue micro-LEDs
title_fullStr	On the mechanism of carrier recombination in downsized blue micro-LEDs
title_full_unstemmed	On the mechanism of carrier recombination in downsized blue micro-LEDs
title_sort	on the mechanism of carrier recombination in downsized blue micro-leds
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/ca59de586c984864bf45bd195eede79b
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On the mechanism of carrier recombination in downsized blue micro-LEDs

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