Loss in discharging atoms through artificial hole for fabricating metallic micro/nanowire by electromigration

The electromigration (EM) technique is a method that is used to ensure the physical growth of metallic micro/nanowires. In the EM technique, the atomic diffusion of metals is intentionally accelerated by controlling the input current and heating the substrate, thus forming a hillock owing to the acc...

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Autor principal: Yasuhiro KIMURA
Formato: article
Lenguaje:EN
Publicado: The Japan Society of Mechanical Engineers 2019
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Acceso en línea:https://doaj.org/article/cac580521cad475d80f84640fa39acb0
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