Deep Learning-Assisted Enhanced Fano Resonances in Symmetry-Breaking SOI Metasurface
Metasurfaces analogues of Fano resonances provide a powerful platform for high sensitivity sensing, nonlinear optics, and light manipulation. However, previous Fano-resonant metasurfaces usually are not compatible with silicon complementary metal-oxide semiconductor circuits due to their hybrid mate...
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| Autores principales: | , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
IEEE
2022
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/caf2f1d9ca1f46948a61a951f078d728 |
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| Sumario: | Metasurfaces analogues of Fano resonances provide a powerful platform for high sensitivity sensing, nonlinear optics, and light manipulation. However, previous Fano-resonant metasurfaces usually are not compatible with silicon complementary metal-oxide semiconductor circuits due to their hybrid material structures and large non-radiative loss. Herein, we theoretically demonstrate a silicon-on-insulator metasurface (SOIM) enhancing Fano resonances by using a tandem neural network design. Multiple Fano resonances with high Q-factor have been observed in the symmetry-breaking SOIM. The Fano-resonant mechanism of the SOIM is analyzed. Additionally, the spectral features of the Fano-resonant SOIM as a function of the symmetry tuning factor of the double silicon nanobars and the environment refractive index are also investigated. The result shows that the Fano-resonant SOIM as a methanol sensor with a sensitivity of 310 nm/RIU can achieve an overall figure of merit of 195 in the near-infrared spectral regime. The designed Fano-resonant SOIM shows enormous potential applications in highly sensitive sensors and light-matter interaction enhancement. |
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