3D Super-Resolution Optical Profiling Using Microsphere Enhanced Mirau Interferometry
Abstract We present quantitative three dimensional images of grooves on a writable Blu-ray Disc based on a single objective Mirau type interferometric microscope, enhanced with a microsphere which is considered as a photonic nanojet source. Along the optical axis the resolution of this microsphere a...
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Autores principales: | Ivan Kassamakov, Sylvain Lecler, Anton Nolvi, Audrey Leong-Hoï, Paul Montgomery, Edward Hæggström |
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Formato: | article |
Lenguaje: | EN |
Publicado: |
Nature Portfolio
2017
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Materias: | |
Acceso en línea: | https://doaj.org/article/cba3e4b3eaa9443bb034d3247f119c80 |
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