Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation

Abstract This letter presents the original design of a microelectromechanical systems inertial switch with ultra‐low threshold (∼0.6 g) and great potential for batch manufacturing. The gravity is utilized to narrow the gap between electrodes during operation, defined here as threshold compensation....

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Autores principales:	Rui You, Wenshuai Lu, Yong Ruan, Yilong Hao
Formato:	article
Lenguaje:	EN
Publicado:	Wiley 2021
Materias:	Electrical engineering. Electronics. Nuclear engineering TK1-9971
Acceso en línea:	https://doaj.org/article/d49bcc1827a44e1e9b2f4a20472f11be
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spelling	oai:doaj.org-article:d49bcc1827a44e1e9b2f4a20472f11be2021-11-16T10:18:22ZMicromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation1350-911X0013-519410.1049/ell2.12001https://doaj.org/article/d49bcc1827a44e1e9b2f4a20472f11be2021-01-01T00:00:00Zhttps://doi.org/10.1049/ell2.12001https://doaj.org/toc/0013-5194https://doaj.org/toc/1350-911XAbstract This letter presents the original design of a microelectromechanical systems inertial switch with ultra‐low threshold (∼0.6 g) and great potential for batch manufacturing. The gravity is utilized to narrow the gap between electrodes during operation, defined here as threshold compensation. This lightens the fabrication burden, enabling the device to be made by standard silicon‐on‐glass micromachining without excessive optimization. Finite element analysis has been conducted to demonstrate positive effects of gravity involvement (9.4 μm reduction of the gap) and compliance design of the movable electrodes (multiplied contact time and less than half coefficient of restitution). Fabricated inertial switches have been installed into a vibration system to test fundamental characteristics. Under vibration conditions with amplitude of 0.6 g and frequencies from 25 to 40 Hz, the devices achieve reliable switching with triggering time ranging from 81.2 to 119.3 μs.Rui YouWenshuai LuYong RuanYilong HaoWileyarticleElectrical engineering. Electronics. Nuclear engineeringTK1-9971ENElectronics Letters, Vol 57, Iss 1, Pp 22-24 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Electrical engineering. Electronics. Nuclear engineering TK1-9971
spellingShingle	Electrical engineering. Electronics. Nuclear engineering TK1-9971 Rui You Wenshuai Lu Yong Ruan Yilong Hao Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation
description	Abstract This letter presents the original design of a microelectromechanical systems inertial switch with ultra‐low threshold (∼0.6 g) and great potential for batch manufacturing. The gravity is utilized to narrow the gap between electrodes during operation, defined here as threshold compensation. This lightens the fabrication burden, enabling the device to be made by standard silicon‐on‐glass micromachining without excessive optimization. Finite element analysis has been conducted to demonstrate positive effects of gravity involvement (9.4 μm reduction of the gap) and compliance design of the movable electrodes (multiplied contact time and less than half coefficient of restitution). Fabricated inertial switches have been installed into a vibration system to test fundamental characteristics. Under vibration conditions with amplitude of 0.6 g and frequencies from 25 to 40 Hz, the devices achieve reliable switching with triggering time ranging from 81.2 to 119.3 μs.
format	article
author	Rui You Wenshuai Lu Yong Ruan Yilong Hao
author_facet	Rui You Wenshuai Lu Yong Ruan Yilong Hao
author_sort	Rui You
title	Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation
title_short	Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation
title_full	Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation
title_fullStr	Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation
title_full_unstemmed	Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation
title_sort	micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation
publisher	Wiley
publishDate	2021
url	https://doaj.org/article/d49bcc1827a44e1e9b2f4a20472f11be
work_keys_str_mv	AT ruiyou micromachinedinertialswitchforsubgmonitoringusinggravitybasedthresholdcompensation AT wenshuailu micromachinedinertialswitchforsubgmonitoringusinggravitybasedthresholdcompensation AT yongruan micromachinedinertialswitchforsubgmonitoringusinggravitybasedthresholdcompensation AT yilonghao micromachinedinertialswitchforsubgmonitoringusinggravitybasedthresholdcompensation
_version_	1718426575811117056

Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation

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