A High-Performance SiC Super-Junction MOSFET With a Step-Doping Profile

In this article, we investigate a 4H-SiC super- junction (SJ) MOSFET structure with a charge-imbalance doping-profile. According to our numerical simulations and comparisons with the conventional SiC VDMOS (C-VDMOS) and SiC SJ VDMOS (SJ-VDMOS) devices, the SJ-MOD structure offers a better trade-off...

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Bibliographic Details
Main Authors: Hao Huang, Ying Wang, Cheng-Hao Yu, Zhao-Huan Tang, Xing-Ji Li, Jian-Qun Yang, Fei Cao
Format: article
Language:EN
Published: IEEE 2021
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Online Access:https://doaj.org/article/d58c3b11aeab4b3eb825d025f9b2842b
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