Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures

Functional materials with high viscosity and solid materials have received more and more attentions in flexible pressure sensors, which are inadequate in the most used molding method. Herein, laser direct writing (LDW) method is proposed to fabricate flexible piezoresistive sensors with microstructu...

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Autores principales: Chenying Zhang, Wei Zhou, Da Geng, Cheng Bai, Weida Li, Songyue Chen, Tao Luo, Lifeng Qin, Yu Xie
Formato: article
Lenguaje:EN
Publicado: Institue of Optics and Electronics, Chinese Academy of Sciences 2021
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Acceso en línea:https://doaj.org/article/d831be003daf4ffc8863de974ea0ba54
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spelling oai:doaj.org-article:d831be003daf4ffc8863de974ea0ba542021-11-17T07:56:50ZLaser direct writing and characterizations of flexible piezoresistive sensors with microstructures2096-457910.29026/oea.2021.200061https://doaj.org/article/d831be003daf4ffc8863de974ea0ba542021-04-01T00:00:00Zhttp://www.oejournal.org/article/doi/10.29026/oea.2021.200061https://doaj.org/toc/2096-4579Functional materials with high viscosity and solid materials have received more and more attentions in flexible pressure sensors, which are inadequate in the most used molding method. Herein, laser direct writing (LDW) method is proposed to fabricate flexible piezoresistive sensors with microstructures on PDMS/ MWCNTs composites with an 8% MWCNTs mass fraction. By controlling laser energy, microstructures with different geometries can be obtained, which significantly impacts the performances of the sensors. Subsequently, curved microcones with excellent performance are fabricated under parameters of f = 40 kHz and v = 150 mm·s-1. The sensor exhibits continuous multi-linear sensitivity, ultrahigh original sensitivity of 21.80 % kPa-1, wide detection range of over 20 kPa, response/recovery time of ~100 ms and good cycle stability for more than 1000 times. Besides, obvious resistance variation can be observed when tiny pressure (a peanut of 30 Pa) is applied. Finally, the flexible piezoresistive sensor can be applied for LED brightness controlling, pulse detection and voice recognition.Chenying ZhangWei ZhouDa GengCheng BaiWeida LiSongyue ChenTao LuoLifeng QinYu XieInstitue of Optics and Electronics, Chinese Academy of Sciencesarticleflexible pressure sensorpiezoresistive sensormicrostructurelaser processingOptics. LightQC350-467ENOpto-Electronic Advances, Vol 4, Iss 4, Pp 1-11 (2021)
institution DOAJ
collection DOAJ
language EN
topic flexible pressure sensor
piezoresistive sensor
microstructure
laser processing
Optics. Light
QC350-467
spellingShingle flexible pressure sensor
piezoresistive sensor
microstructure
laser processing
Optics. Light
QC350-467
Chenying Zhang
Wei Zhou
Da Geng
Cheng Bai
Weida Li
Songyue Chen
Tao Luo
Lifeng Qin
Yu Xie
Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures
description Functional materials with high viscosity and solid materials have received more and more attentions in flexible pressure sensors, which are inadequate in the most used molding method. Herein, laser direct writing (LDW) method is proposed to fabricate flexible piezoresistive sensors with microstructures on PDMS/ MWCNTs composites with an 8% MWCNTs mass fraction. By controlling laser energy, microstructures with different geometries can be obtained, which significantly impacts the performances of the sensors. Subsequently, curved microcones with excellent performance are fabricated under parameters of f = 40 kHz and v = 150 mm·s-1. The sensor exhibits continuous multi-linear sensitivity, ultrahigh original sensitivity of 21.80 % kPa-1, wide detection range of over 20 kPa, response/recovery time of ~100 ms and good cycle stability for more than 1000 times. Besides, obvious resistance variation can be observed when tiny pressure (a peanut of 30 Pa) is applied. Finally, the flexible piezoresistive sensor can be applied for LED brightness controlling, pulse detection and voice recognition.
format article
author Chenying Zhang
Wei Zhou
Da Geng
Cheng Bai
Weida Li
Songyue Chen
Tao Luo
Lifeng Qin
Yu Xie
author_facet Chenying Zhang
Wei Zhou
Da Geng
Cheng Bai
Weida Li
Songyue Chen
Tao Luo
Lifeng Qin
Yu Xie
author_sort Chenying Zhang
title Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures
title_short Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures
title_full Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures
title_fullStr Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures
title_full_unstemmed Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures
title_sort laser direct writing and characterizations of flexible piezoresistive sensors with microstructures
publisher Institue of Optics and Electronics, Chinese Academy of Sciences
publishDate 2021
url https://doaj.org/article/d831be003daf4ffc8863de974ea0ba54
work_keys_str_mv AT chenyingzhang laserdirectwritingandcharacterizationsofflexiblepiezoresistivesensorswithmicrostructures
AT weizhou laserdirectwritingandcharacterizationsofflexiblepiezoresistivesensorswithmicrostructures
AT dageng laserdirectwritingandcharacterizationsofflexiblepiezoresistivesensorswithmicrostructures
AT chengbai laserdirectwritingandcharacterizationsofflexiblepiezoresistivesensorswithmicrostructures
AT weidali laserdirectwritingandcharacterizationsofflexiblepiezoresistivesensorswithmicrostructures
AT songyuechen laserdirectwritingandcharacterizationsofflexiblepiezoresistivesensorswithmicrostructures
AT taoluo laserdirectwritingandcharacterizationsofflexiblepiezoresistivesensorswithmicrostructures
AT lifengqin laserdirectwritingandcharacterizationsofflexiblepiezoresistivesensorswithmicrostructures
AT yuxie laserdirectwritingandcharacterizationsofflexiblepiezoresistivesensorswithmicrostructures
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