Analysis, Synthesis and Characterization of Thin Films of a-Si:H (n-type and p-type) Deposited by PECVD for Solar Cell Applications
In this paper, the analysis, synthesis and characterization of thin films of a-Si:H deposited by PECVD were carried out. Three types of films were deposited: In the first series (00 process), an intrinsic a-Si:H film was doped. In the second series (A1–A5 process), n-type samples were doped, and to...
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Autores principales: | Abel Garcia-Barrientos, Jose Luis Bernal-Ponce, Jairo Plaza-Castillo, Alberto Cuevas-Salgado, Ariosto Medina-Flores, María Silvia Garcia-Monterrosas, Alfonso Torres-Jacome |
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Formato: | article |
Lenguaje: | EN |
Publicado: |
MDPI AG
2021
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Materias: | |
Acceso en línea: | https://doaj.org/article/d8400d8f00844f6c8f163f5031ab8c7c |
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