Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
Abstract In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique all...
Guardado en:
Autores principales: | , , , , |
---|---|
Formato: | article |
Lenguaje: | EN |
Publicado: |
Nature Portfolio
2019
|
Materias: | |
Acceso en línea: | https://doaj.org/article/da8da0e4beba4c2f8c60be0c9cf2a67b |
Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|
id |
oai:doaj.org-article:da8da0e4beba4c2f8c60be0c9cf2a67b |
---|---|
record_format |
dspace |
spelling |
oai:doaj.org-article:da8da0e4beba4c2f8c60be0c9cf2a67b2021-12-02T15:09:20ZContactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption10.1038/s41598-019-49804-82045-2322https://doaj.org/article/da8da0e4beba4c2f8c60be0c9cf2a67b2019-10-01T00:00:00Zhttps://doi.org/10.1038/s41598-019-49804-8https://doaj.org/toc/2045-2322Abstract In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique allows for high-resolution images. Furthermore, this technique also allows to discriminate between the presence of thermal donors or oxygen precipitates in as-grown wafers, without requiring a thermal donor killing step.Fiacre E. RougieuxWolfram KwapilFriedemann HeinzManjula SiriwardhanaMartin C. SchubertNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 9, Iss 1, Pp 1-5 (2019) |
institution |
DOAJ |
collection |
DOAJ |
language |
EN |
topic |
Medicine R Science Q |
spellingShingle |
Medicine R Science Q Fiacre E. Rougieux Wolfram Kwapil Friedemann Heinz Manjula Siriwardhana Martin C. Schubert Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption |
description |
Abstract In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique allows for high-resolution images. Furthermore, this technique also allows to discriminate between the presence of thermal donors or oxygen precipitates in as-grown wafers, without requiring a thermal donor killing step. |
format |
article |
author |
Fiacre E. Rougieux Wolfram Kwapil Friedemann Heinz Manjula Siriwardhana Martin C. Schubert |
author_facet |
Fiacre E. Rougieux Wolfram Kwapil Friedemann Heinz Manjula Siriwardhana Martin C. Schubert |
author_sort |
Fiacre E. Rougieux |
title |
Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption |
title_short |
Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption |
title_full |
Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption |
title_fullStr |
Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption |
title_full_unstemmed |
Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption |
title_sort |
contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption |
publisher |
Nature Portfolio |
publishDate |
2019 |
url |
https://doaj.org/article/da8da0e4beba4c2f8c60be0c9cf2a67b |
work_keys_str_mv |
AT fiacreerougieux contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption AT wolframkwapil contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption AT friedemannheinz contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption AT manjulasiriwardhana contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption AT martincschubert contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption |
_version_ |
1718387843871539200 |