Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption

Abstract In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique all...

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Auteurs principaux:	Fiacre E. Rougieux, Wolfram Kwapil, Friedemann Heinz, Manjula Siriwardhana, Martin C. Schubert
Format:	article
Langue:	EN
Publié:	Nature Portfolio 2019
Sujets:	Medicine R Science Q
Accès en ligne:	https://doaj.org/article/da8da0e4beba4c2f8c60be0c9cf2a67b
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spelling	oai:doaj.org-article:da8da0e4beba4c2f8c60be0c9cf2a67b2021-12-02T15:09:20ZContactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption10.1038/s41598-019-49804-82045-2322https://doaj.org/article/da8da0e4beba4c2f8c60be0c9cf2a67b2019-10-01T00:00:00Zhttps://doi.org/10.1038/s41598-019-49804-8https://doaj.org/toc/2045-2322Abstract In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique allows for high-resolution images. Furthermore, this technique also allows to discriminate between the presence of thermal donors or oxygen precipitates in as-grown wafers, without requiring a thermal donor killing step.Fiacre E. RougieuxWolfram KwapilFriedemann HeinzManjula SiriwardhanaMartin C. SchubertNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 9, Iss 1, Pp 1-5 (2019)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Fiacre E. Rougieux Wolfram Kwapil Friedemann Heinz Manjula Siriwardhana Martin C. Schubert Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
description	Abstract In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique allows for high-resolution images. Furthermore, this technique also allows to discriminate between the presence of thermal donors or oxygen precipitates in as-grown wafers, without requiring a thermal donor killing step.
format	article
author	Fiacre E. Rougieux Wolfram Kwapil Friedemann Heinz Manjula Siriwardhana Martin C. Schubert
author_facet	Fiacre E. Rougieux Wolfram Kwapil Friedemann Heinz Manjula Siriwardhana Martin C. Schubert
author_sort	Fiacre E. Rougieux
title	Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_short	Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_full	Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_fullStr	Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_full_unstemmed	Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_sort	contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
publisher	Nature Portfolio
publishDate	2019
url	https://doaj.org/article/da8da0e4beba4c2f8c60be0c9cf2a67b
work_keys_str_mv	AT fiacreerougieux contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption AT wolframkwapil contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption AT friedemannheinz contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption AT manjulasiriwardhana contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption AT martincschubert contactlesstransientcarrierspectroscopyandimagingtechniqueusinglockinfreecarrieremissionandabsorption
_version_	1718387843871539200

Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption

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