Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films

Integrated flexible tactile sensors: downsizing for higher performance By reducing feature size to one micron, flexible tactile sensors with high spatial resolution and sensitivity are demonstrated. A collaborative team led by Nian-Xiang Sun from the Department of Electrical and Computer Engineering...

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Autores principales:	Zhiguang Wang, Cunzheng Dong, Xinjun Wang, Menghui Li, Tianxiang Nan, Xianfeng Liang, Huaihao Chen, Yuyi Wei, Haomiao Zhou, Mohsen Zaeimbashi, Syd Cash, Nian-Xiang Sun
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2018
Materias:	Electronics TK7800-8360 Materials of engineering and construction. Mechanics of materials TA401-492
Acceso en línea:	https://doaj.org/article/dd4f736616c04845897206649f36e20d
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id	oai:doaj.org-article:dd4f736616c04845897206649f36e20d
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spelling	oai:doaj.org-article:dd4f736616c04845897206649f36e20d2021-12-02T14:18:12ZHighly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films10.1038/s41528-018-0030-42397-4621https://doaj.org/article/dd4f736616c04845897206649f36e20d2018-06-01T00:00:00Zhttps://doi.org/10.1038/s41528-018-0030-4https://doaj.org/toc/2397-4621Integrated flexible tactile sensors: downsizing for higher performance By reducing feature size to one micron, flexible tactile sensors with high spatial resolution and sensitivity are demonstrated. A collaborative team led by Nian-Xiang Sun from the Department of Electrical and Computer Engineering at Northeastern University developed integrated flexible tactile sensors and sensor arrays with high sensitivity and spatial resolution. The sensor’s high sensitivity (e.g. gauge factor of 338) is due to developed piezoresistive Ge2Sb2Te5 thin films. To obtain a high spatial resolution above 12,700 pixels per inch, the sensor’s feature size was reduced to one micron. Sun and co-workers demonstrate the applicability of the integrated flexible tactile sensors for next-generation touch display applications through proof-of-concept 5 × 5 sensor arrays and Ge2Sb2Te5 strain sensors with enhanced performance at smaller size.Zhiguang WangCunzheng DongXinjun WangMenghui LiTianxiang NanXianfeng LiangHuaihao ChenYuyi WeiHaomiao ZhouMohsen ZaeimbashiSyd CashNian-Xiang SunNature PortfolioarticleElectronicsTK7800-8360Materials of engineering and construction. Mechanics of materialsTA401-492ENnpj Flexible Electronics, Vol 2, Iss 1, Pp 1-6 (2018)
institution	DOAJ
collection	DOAJ
language	EN
topic	Electronics TK7800-8360 Materials of engineering and construction. Mechanics of materials TA401-492
spellingShingle	Electronics TK7800-8360 Materials of engineering and construction. Mechanics of materials TA401-492 Zhiguang Wang Cunzheng Dong Xinjun Wang Menghui Li Tianxiang Nan Xianfeng Liang Huaihao Chen Yuyi Wei Haomiao Zhou Mohsen Zaeimbashi Syd Cash Nian-Xiang Sun Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films
description	Integrated flexible tactile sensors: downsizing for higher performance By reducing feature size to one micron, flexible tactile sensors with high spatial resolution and sensitivity are demonstrated. A collaborative team led by Nian-Xiang Sun from the Department of Electrical and Computer Engineering at Northeastern University developed integrated flexible tactile sensors and sensor arrays with high sensitivity and spatial resolution. The sensor’s high sensitivity (e.g. gauge factor of 338) is due to developed piezoresistive Ge2Sb2Te5 thin films. To obtain a high spatial resolution above 12,700 pixels per inch, the sensor’s feature size was reduced to one micron. Sun and co-workers demonstrate the applicability of the integrated flexible tactile sensors for next-generation touch display applications through proof-of-concept 5 × 5 sensor arrays and Ge2Sb2Te5 strain sensors with enhanced performance at smaller size.
format	article
author	Zhiguang Wang Cunzheng Dong Xinjun Wang Menghui Li Tianxiang Nan Xianfeng Liang Huaihao Chen Yuyi Wei Haomiao Zhou Mohsen Zaeimbashi Syd Cash Nian-Xiang Sun
author_facet	Zhiguang Wang Cunzheng Dong Xinjun Wang Menghui Li Tianxiang Nan Xianfeng Liang Huaihao Chen Yuyi Wei Haomiao Zhou Mohsen Zaeimbashi Syd Cash Nian-Xiang Sun
author_sort	Zhiguang Wang
title	Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films
title_short	Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films
title_full	Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films
title_fullStr	Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films
title_full_unstemmed	Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films
title_sort	highly sensitive integrated flexible tactile sensors with piezoresistive ge 2 sb2te5 thin films
publisher	Nature Portfolio
publishDate	2018
url	https://doaj.org/article/dd4f736616c04845897206649f36e20d
work_keys_str_mv	AT zhiguangwang highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT cunzhengdong highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT xinjunwang highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT menghuili highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT tianxiangnan highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT xianfengliang highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT huaihaochen highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT yuyiwei highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT haomiaozhou highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT mohsenzaeimbashi highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT sydcash highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms AT nianxiangsun highlysensitiveintegratedflexibletactilesensorswithpiezoresistivege2sb2te5thinfilms
_version_	1718391637977071616

Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films

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