Microvalve with Trapezoid-Shaped Cross-Section for Deep Microchannels
Simple microfluidic systems for handling large particles such as three-dimensional (3D) cultured cells, microcapsules, and animalcules have contributed to the advancement of biology. However, obtaining a highly integrated microfluidic device for handling large particles is difficult because there ar...
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2021
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oai:doaj.org-article:dd86def846934339aa78919b829f54222021-11-25T18:23:43ZMicrovalve with Trapezoid-Shaped Cross-Section for Deep Microchannels10.3390/mi121114032072-666Xhttps://doaj.org/article/dd86def846934339aa78919b829f54222021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1403https://doaj.org/toc/2072-666XSimple microfluidic systems for handling large particles such as three-dimensional (3D) cultured cells, microcapsules, and animalcules have contributed to the advancement of biology. However, obtaining a highly integrated microfluidic device for handling large particles is difficult because there are no suitable microvalves for deep microchannels. Therefore, this study proposes a microvalve with a trapezoid-shaped cross-section to close a deep microchannel. The proposed microvalve can close a 350 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m deep microchannel, which is suitable for handling hundreds of micrometer-scale particles. A double-inclined lithography process was used to fabricate the trapezoid-shaped cross-section. The microvalve was fabricated by bonding three polydimethylsiloxane layers: a trapezoid-shaped liquid channel layer, a membrane, and a pneumatic channel layer. The pneumatic balloon, consisting of the membrane and the pneumatic channel, was located beneath a trapezoid-shaped cross-section microchannel. The valve was operated by the application of pneumatic pressure to the pneumatic channel. We experimentally confirmed that the expansion of the pneumatic balloon could close the 350 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m deep microchannel.Maho KaminagaTadashi IshidaToru OmataMDPI AGarticlemicrofluidic devicepneumatic microvalveinclined lithographyMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1403, p 1403 (2021) |
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microfluidic device pneumatic microvalve inclined lithography Mechanical engineering and machinery TJ1-1570 |
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microfluidic device pneumatic microvalve inclined lithography Mechanical engineering and machinery TJ1-1570 Maho Kaminaga Tadashi Ishida Toru Omata Microvalve with Trapezoid-Shaped Cross-Section for Deep Microchannels |
description |
Simple microfluidic systems for handling large particles such as three-dimensional (3D) cultured cells, microcapsules, and animalcules have contributed to the advancement of biology. However, obtaining a highly integrated microfluidic device for handling large particles is difficult because there are no suitable microvalves for deep microchannels. Therefore, this study proposes a microvalve with a trapezoid-shaped cross-section to close a deep microchannel. The proposed microvalve can close a 350 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m deep microchannel, which is suitable for handling hundreds of micrometer-scale particles. A double-inclined lithography process was used to fabricate the trapezoid-shaped cross-section. The microvalve was fabricated by bonding three polydimethylsiloxane layers: a trapezoid-shaped liquid channel layer, a membrane, and a pneumatic channel layer. The pneumatic balloon, consisting of the membrane and the pneumatic channel, was located beneath a trapezoid-shaped cross-section microchannel. The valve was operated by the application of pneumatic pressure to the pneumatic channel. We experimentally confirmed that the expansion of the pneumatic balloon could close the 350 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m deep microchannel. |
format |
article |
author |
Maho Kaminaga Tadashi Ishida Toru Omata |
author_facet |
Maho Kaminaga Tadashi Ishida Toru Omata |
author_sort |
Maho Kaminaga |
title |
Microvalve with Trapezoid-Shaped Cross-Section for Deep Microchannels |
title_short |
Microvalve with Trapezoid-Shaped Cross-Section for Deep Microchannels |
title_full |
Microvalve with Trapezoid-Shaped Cross-Section for Deep Microchannels |
title_fullStr |
Microvalve with Trapezoid-Shaped Cross-Section for Deep Microchannels |
title_full_unstemmed |
Microvalve with Trapezoid-Shaped Cross-Section for Deep Microchannels |
title_sort |
microvalve with trapezoid-shaped cross-section for deep microchannels |
publisher |
MDPI AG |
publishDate |
2021 |
url |
https://doaj.org/article/dd86def846934339aa78919b829f5422 |
work_keys_str_mv |
AT mahokaminaga microvalvewithtrapezoidshapedcrosssectionfordeepmicrochannels AT tadashiishida microvalvewithtrapezoidshapedcrosssectionfordeepmicrochannels AT toruomata microvalvewithtrapezoidshapedcrosssectionfordeepmicrochannels |
_version_ |
1718411229126459392 |