Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
Abstract We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 t...
Guardado en:
| Autores principales: | , , , , , , |
|---|---|
| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2017
|
| Materias: | |
| Acceso en línea: | https://doaj.org/article/ddf18d30b87743c6b01ab4fd03a70149 |
| Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|
| Sumario: | Abstract We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 times greater with the two-color method than with the one-color method. Adding a correction arm reduces the deviation caused by the uncertainties in measured optical distances. The uncertainty in the measured path length is reduced to 20 nm over a path length of 1500 mm, giving a relative uncertainty of 1.34 × 10 −8. |
|---|