Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances

Abstract We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 t...

Descripción completa

Guardado en:

Detalles Bibliográficos
Autores principales:	Zhaowu Liu, Wenhao Li, Bayanheshig, Xiaotian Li, Shan Jiang, Ying Song, Qiang Lv
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/ddf18d30b87743c6b01ab4fd03a70149
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

id	oai:doaj.org-article:ddf18d30b87743c6b01ab4fd03a70149
record_format	dspace
spelling	oai:doaj.org-article:ddf18d30b87743c6b01ab4fd03a701492021-12-02T15:06:08ZTwo-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances10.1038/s41598-017-07741-42045-2322https://doaj.org/article/ddf18d30b87743c6b01ab4fd03a701492017-08-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-07741-4https://doaj.org/toc/2045-2322Abstract We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 times greater with the two-color method than with the one-color method. Adding a correction arm reduces the deviation caused by the uncertainties in measured optical distances. The uncertainty in the measured path length is reduced to 20 nm over a path length of 1500 mm, giving a relative uncertainty of 1.34 × 10 −8.Zhaowu LiuWenhao LiBayanheshigXiaotian LiShan JiangYing SongQiang LvNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-10 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Zhaowu Liu Wenhao Li Bayanheshig Xiaotian Li Shan Jiang Ying Song Qiang Lv Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
description	Abstract We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 times greater with the two-color method than with the one-color method. Adding a correction arm reduces the deviation caused by the uncertainties in measured optical distances. The uncertainty in the measured path length is reduced to 20 nm over a path length of 1500 mm, giving a relative uncertainty of 1.34 × 10 −8.
format	article
author	Zhaowu Liu Wenhao Li Bayanheshig Xiaotian Li Shan Jiang Ying Song Qiang Lv
author_facet	Zhaowu Liu Wenhao Li Bayanheshig Xiaotian Li Shan Jiang Ying Song Qiang Lv
author_sort	Zhaowu Liu
title	Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
title_short	Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
title_full	Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
title_fullStr	Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
title_full_unstemmed	Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
title_sort	two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/ddf18d30b87743c6b01ab4fd03a70149
work_keys_str_mv	AT zhaowuliu twocolorheterodynelaserinterferometryforlongdistancestagemeasurementwithcorrectionofuncertaintiesinmeasuredopticaldistances AT wenhaoli twocolorheterodynelaserinterferometryforlongdistancestagemeasurementwithcorrectionofuncertaintiesinmeasuredopticaldistances AT bayanheshig twocolorheterodynelaserinterferometryforlongdistancestagemeasurementwithcorrectionofuncertaintiesinmeasuredopticaldistances AT xiaotianli twocolorheterodynelaserinterferometryforlongdistancestagemeasurementwithcorrectionofuncertaintiesinmeasuredopticaldistances AT shanjiang twocolorheterodynelaserinterferometryforlongdistancestagemeasurementwithcorrectionofuncertaintiesinmeasuredopticaldistances AT yingsong twocolorheterodynelaserinterferometryforlongdistancestagemeasurementwithcorrectionofuncertaintiesinmeasuredopticaldistances AT qianglv twocolorheterodynelaserinterferometryforlongdistancestagemeasurementwithcorrectionofuncertaintiesinmeasuredopticaldistances
_version_	1718388614670319616

Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances

Ejemplares similares