Microdomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: X-ray scattering and IR nanospectroscopy analyses

Self-assembled block copolymer (BCP) thin films necessarily require a distinct chemical contrast between the blocks (or microdomain homogeneity) for the purpose of high-resolution pattern transfer applications. Despite its importance, however, there has been difficulty in measuring the chemical dist...

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Autores principales:	Wooseop Lee, Jiho Kim, Seungyun Jo, Boknam Chae, Hyungju Ahn, Du Yeol Ryu
Formato:	article
Lenguaje:	EN
Publicado:	Elsevier 2021
Materias:	IR nanospectroscopy Block copolymer film Perpendicular lamellae Microdomain homogeneity Chemical distribution Polymers and polymer manufacture TP1080-1185
Acceso en línea:	https://doaj.org/article/df7bbf25698f4af78c79c97b3a1ed77e
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spelling	oai:doaj.org-article:df7bbf25698f4af78c79c97b3a1ed77e2021-11-14T04:28:13ZMicrodomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: X-ray scattering and IR nanospectroscopy analyses0142-941810.1016/j.polymertesting.2021.107409https://doaj.org/article/df7bbf25698f4af78c79c97b3a1ed77e2021-12-01T00:00:00Zhttp://www.sciencedirect.com/science/article/pii/S0142941821003524https://doaj.org/toc/0142-9418Self-assembled block copolymer (BCP) thin films necessarily require a distinct chemical contrast between the blocks (or microdomain homogeneity) for the purpose of high-resolution pattern transfer applications. Despite its importance, however, there has been difficulty in measuring the chemical distribution associated with the self-assembling processes, i.e. solvent vapor annealing (SVA) or thermal annealing (TA). Herein, we present a simple yet effective method to probe the chemical distribution over polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA) films that underwent the SVA or SVA + TA processes. An IR nanospectroscopy using scattering-type scanning near-field optical microscopy (s-SNOM), in concert with X-ray scattering analyses, provides the relative chemical concentration of the perpendicular lamellar patterns. The chemical mapping for the components based on the s-SNOM reveals that the SVA process leaves a considerable portion of the intermixed zones of PS and PMMA blocks, whereas the subsequent TA process facilitates the chain segregation towards high-contrast chemical distribution. Interestingly, such a microdomain homogeneity critically affects the quality of the unidirectional Al2O3 lines that were substituted from topographically guided lamellae. Our results substantiate an important insight into understanding the chain redistribution behavior in the self-assembled BCP films using non-destructive s-SNOM technique.Wooseop LeeJiho KimSeungyun JoBoknam ChaeHyungju AhnDu Yeol RyuElsevierarticleIR nanospectroscopyBlock copolymer filmPerpendicular lamellaeMicrodomain homogeneityChemical distributionPolymers and polymer manufactureTP1080-1185ENPolymer Testing, Vol 104, Iss , Pp 107409- (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	IR nanospectroscopy Block copolymer film Perpendicular lamellae Microdomain homogeneity Chemical distribution Polymers and polymer manufacture TP1080-1185
spellingShingle	IR nanospectroscopy Block copolymer film Perpendicular lamellae Microdomain homogeneity Chemical distribution Polymers and polymer manufacture TP1080-1185 Wooseop Lee Jiho Kim Seungyun Jo Boknam Chae Hyungju Ahn Du Yeol Ryu Microdomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: X-ray scattering and IR nanospectroscopy analyses
description	Self-assembled block copolymer (BCP) thin films necessarily require a distinct chemical contrast between the blocks (or microdomain homogeneity) for the purpose of high-resolution pattern transfer applications. Despite its importance, however, there has been difficulty in measuring the chemical distribution associated with the self-assembling processes, i.e. solvent vapor annealing (SVA) or thermal annealing (TA). Herein, we present a simple yet effective method to probe the chemical distribution over polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA) films that underwent the SVA or SVA + TA processes. An IR nanospectroscopy using scattering-type scanning near-field optical microscopy (s-SNOM), in concert with X-ray scattering analyses, provides the relative chemical concentration of the perpendicular lamellar patterns. The chemical mapping for the components based on the s-SNOM reveals that the SVA process leaves a considerable portion of the intermixed zones of PS and PMMA blocks, whereas the subsequent TA process facilitates the chain segregation towards high-contrast chemical distribution. Interestingly, such a microdomain homogeneity critically affects the quality of the unidirectional Al2O3 lines that were substituted from topographically guided lamellae. Our results substantiate an important insight into understanding the chain redistribution behavior in the self-assembled BCP films using non-destructive s-SNOM technique.
format	article
author	Wooseop Lee Jiho Kim Seungyun Jo Boknam Chae Hyungju Ahn Du Yeol Ryu
author_facet	Wooseop Lee Jiho Kim Seungyun Jo Boknam Chae Hyungju Ahn Du Yeol Ryu
author_sort	Wooseop Lee
title	Microdomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: X-ray scattering and IR nanospectroscopy analyses
title_short	Microdomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: X-ray scattering and IR nanospectroscopy analyses
title_full	Microdomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: X-ray scattering and IR nanospectroscopy analyses
title_fullStr	Microdomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: X-ray scattering and IR nanospectroscopy analyses
title_full_unstemmed	Microdomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: X-ray scattering and IR nanospectroscopy analyses
title_sort	microdomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: x-ray scattering and ir nanospectroscopy analyses
publisher	Elsevier
publishDate	2021
url	https://doaj.org/article/df7bbf25698f4af78c79c97b3a1ed77e
work_keys_str_mv	AT wooseoplee microdomainhomogeneityevaluationofperpendicularlamellarstructuresinblockcopolymerfilmsxrayscatteringandirnanospectroscopyanalyses AT jihokim microdomainhomogeneityevaluationofperpendicularlamellarstructuresinblockcopolymerfilmsxrayscatteringandirnanospectroscopyanalyses AT seungyunjo microdomainhomogeneityevaluationofperpendicularlamellarstructuresinblockcopolymerfilmsxrayscatteringandirnanospectroscopyanalyses AT boknamchae microdomainhomogeneityevaluationofperpendicularlamellarstructuresinblockcopolymerfilmsxrayscatteringandirnanospectroscopyanalyses AT hyungjuahn microdomainhomogeneityevaluationofperpendicularlamellarstructuresinblockcopolymerfilmsxrayscatteringandirnanospectroscopyanalyses AT duyeolryu microdomainhomogeneityevaluationofperpendicularlamellarstructuresinblockcopolymerfilmsxrayscatteringandirnanospectroscopyanalyses
_version_	1718430047900008448

Microdomain homogeneity evaluation of perpendicular lamellar structures in block copolymer films: X-ray scattering and IR nanospectroscopy analyses

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