A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths

Micro lens-on-lens array (MLLA) is a novel 3D structure with unique optical properties that cannot be fabricated accurately and quickly by existing processing methods. In this paper, a new fabricating method of MLLAs with two focal lengths is proposed. By introducing the soft lithography technology,...

Descripción completa

Guardado en:

Detalles Bibliográficos
Autores principales:	Xin Liu, Min Li, Jiang Bian, Junfeng Du, Bincheng Li, Bin Fan
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	microlens arrays micro lens-on-lens arrays photoresist reflow method soft lithography nano-imprint technology mask alignment exposure technology Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/dfa67aeb59034cbb86c1b64fd689f1c7
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

id	oai:doaj.org-article:dfa67aeb59034cbb86c1b64fd689f1c7
record_format	dspace
spelling	oai:doaj.org-article:dfa67aeb59034cbb86c1b64fd689f1c72021-11-25T18:23:29ZA Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths10.3390/mi121113722072-666Xhttps://doaj.org/article/dfa67aeb59034cbb86c1b64fd689f1c72021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1372https://doaj.org/toc/2072-666XMicro lens-on-lens array (MLLA) is a novel 3D structure with unique optical properties that cannot be fabricated accurately and quickly by existing processing methods. In this paper, a new fabricating method of MLLAs with two focal lengths is proposed. By introducing the soft lithography technology, nano-imprint technology and mask alignment exposure technology, MLLAs with high precisions can be obtained. A MLLA is successfully fabricated with two focal lengths of 58 μm and 344 μm, and an experiment is carried out. The results show that the MLLA has excellent two-level focusing and imaging abilities. Furthermore, the fabricated profiles of the MLLA agree well with the designed profiles, and the morphology deviation of the MLLA is better than 2%, satisfying the application requirements. The results verify the feasibility and validity of the novel fabricating method. By adjusting mask patterns and processing parameters, MLLAs with both changeable sizes and focal lengths can be obtained.Xin LiuMin LiJiang BianJunfeng DuBincheng LiBin FanMDPI AGarticlemicrolens arraysmicro lens-on-lens arraysphotoresist reflow methodsoft lithographynano-imprint technologymask alignment exposure technologyMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1372, p 1372 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	microlens arrays micro lens-on-lens arrays photoresist reflow method soft lithography nano-imprint technology mask alignment exposure technology Mechanical engineering and machinery TJ1-1570
spellingShingle	microlens arrays micro lens-on-lens arrays photoresist reflow method soft lithography nano-imprint technology mask alignment exposure technology Mechanical engineering and machinery TJ1-1570 Xin Liu Min Li Jiang Bian Junfeng Du Bincheng Li Bin Fan A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths
description	Micro lens-on-lens array (MLLA) is a novel 3D structure with unique optical properties that cannot be fabricated accurately and quickly by existing processing methods. In this paper, a new fabricating method of MLLAs with two focal lengths is proposed. By introducing the soft lithography technology, nano-imprint technology and mask alignment exposure technology, MLLAs with high precisions can be obtained. A MLLA is successfully fabricated with two focal lengths of 58 μm and 344 μm, and an experiment is carried out. The results show that the MLLA has excellent two-level focusing and imaging abilities. Furthermore, the fabricated profiles of the MLLA agree well with the designed profiles, and the morphology deviation of the MLLA is better than 2%, satisfying the application requirements. The results verify the feasibility and validity of the novel fabricating method. By adjusting mask patterns and processing parameters, MLLAs with both changeable sizes and focal lengths can be obtained.
format	article
author	Xin Liu Min Li Jiang Bian Junfeng Du Bincheng Li Bin Fan
author_facet	Xin Liu Min Li Jiang Bian Junfeng Du Bincheng Li Bin Fan
author_sort	Xin Liu
title	A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths
title_short	A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths
title_full	A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths
title_fullStr	A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths
title_full_unstemmed	A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths
title_sort	novel fabricating method of micro lens-on-lens arrays with two focal lengths
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/dfa67aeb59034cbb86c1b64fd689f1c7
work_keys_str_mv	AT xinliu anovelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT minli anovelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT jiangbian anovelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT junfengdu anovelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT binchengli anovelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT binfan anovelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT xinliu novelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT minli novelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT jiangbian novelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT junfengdu novelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT binchengli novelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths AT binfan novelfabricatingmethodofmicrolensonlensarrayswithtwofocallengths
_version_	1718411229550084096

A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths

Ejemplares similares