Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications

Abstract Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direct...

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Autores principales:	Zhangbin Ji, Jian Zhou, Huamao Lin, Jianhui Wu, Dinghong Zhang, Sean Garner, Alex Gu, Shurong Dong, YongQing Fu, Huigao Duan
Formato:	article
Lenguaje:	EN
Publicado:	Nature Publishing Group 2021
Materias:	Technology T Engineering (General). Civil engineering (General) TA1-2040
Acceso en línea:	https://doaj.org/article/e03fd7dfb84a41b59c9bc6538f720933
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spelling	oai:doaj.org-article:e03fd7dfb84a41b59c9bc6538f7209332021-11-28T12:07:58ZFlexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications10.1038/s41378-021-00325-32055-7434https://doaj.org/article/e03fd7dfb84a41b59c9bc6538f7209332021-11-01T00:00:00Zhttps://doi.org/10.1038/s41378-021-00325-3https://doaj.org/toc/2055-7434Abstract Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direction and bending direction. Currently, there are few studies on this topic, and the bending mechanisms during off-axis bending deformations have remained unexplored for multisensing applications. Herein, we fabricated aluminum nitride (AlN) flexible SAW devices by using high-quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors. A theoretical model was first developed using coupling wave equations and the boundary condition method to analyze the characteristics of the device with bending and off-axis deformation under elastic strains. The relationships between the frequency shifts of the SAW device and the bending strain and off-axis angle were obtained, and the results were identical to those from the theoretical calculations. Finally, we performed proof-of-concept demonstrations of its multisensing potential by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface, thus paving the way for the application of versatile flexible electronics.Zhangbin JiJian ZhouHuamao LinJianhui WuDinghong ZhangSean GarnerAlex GuShurong DongYongQing FuHuigao DuanNature Publishing GrouparticleTechnologyTEngineering (General). Civil engineering (General)TA1-2040ENMicrosystems & Nanoengineering, Vol 7, Iss 1, Pp 1-9 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Technology T Engineering (General). Civil engineering (General) TA1-2040
spellingShingle	Technology T Engineering (General). Civil engineering (General) TA1-2040 Zhangbin Ji Jian Zhou Huamao Lin Jianhui Wu Dinghong Zhang Sean Garner Alex Gu Shurong Dong YongQing Fu Huigao Duan Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications
description	Abstract Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direction and bending direction. Currently, there are few studies on this topic, and the bending mechanisms during off-axis bending deformations have remained unexplored for multisensing applications. Herein, we fabricated aluminum nitride (AlN) flexible SAW devices by using high-quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors. A theoretical model was first developed using coupling wave equations and the boundary condition method to analyze the characteristics of the device with bending and off-axis deformation under elastic strains. The relationships between the frequency shifts of the SAW device and the bending strain and off-axis angle were obtained, and the results were identical to those from the theoretical calculations. Finally, we performed proof-of-concept demonstrations of its multisensing potential by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface, thus paving the way for the application of versatile flexible electronics.
format	article
author	Zhangbin Ji Jian Zhou Huamao Lin Jianhui Wu Dinghong Zhang Sean Garner Alex Gu Shurong Dong YongQing Fu Huigao Duan
author_facet	Zhangbin Ji Jian Zhou Huamao Lin Jianhui Wu Dinghong Zhang Sean Garner Alex Gu Shurong Dong YongQing Fu Huigao Duan
author_sort	Zhangbin Ji
title	Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications
title_short	Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications
title_full	Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications
title_fullStr	Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications
title_full_unstemmed	Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications
title_sort	flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications
publisher	Nature Publishing Group
publishDate	2021
url	https://doaj.org/article/e03fd7dfb84a41b59c9bc6538f720933
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Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications

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