Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications
Abstract Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direct...
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Main Authors: | , , , , , , , , , |
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Format: | article |
Language: | EN |
Published: |
Nature Publishing Group
2021
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Subjects: | |
Online Access: | https://doaj.org/article/e03fd7dfb84a41b59c9bc6538f720933 |
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