A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics

Abstract For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz1/2 resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the o...

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Autores principales:	Yongjun Huang, Jaime Gonzalo Flor Flores, Ziqiang Cai, Mingbin Yu, Dim-Lee Kwong, Guangjun Wen, Layne Churchill, Chee Wei Wong
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/e0873c505d804f5ab6e0ef9604e68da4
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spelling	oai:doaj.org-article:e0873c505d804f5ab6e0ef9604e68da42021-12-02T15:06:27ZA low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics10.1038/s41598-017-04882-42045-2322https://doaj.org/article/e0873c505d804f5ab6e0ef9604e68da42017-06-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-04882-4https://doaj.org/toc/2045-2322Abstract For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz1/2 resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomechanical coupling is the key parameter for achieving high sensitivity and resolution. Here we demonstrate a chip-scale optomechanical cavity with large mass which operates at ≈77.7 kHz fundamental mode and intrinsically exhibiting large optomechanical coupling of 44 GHz/nm or more, for both optical resonance modes. The mechanical stiffening range of ≈58 kHz and a more than 100th-order harmonics are obtained, with which the free-running frequency instability is lower than 10−6 at 100 ms integration time. Such results can be applied to further improve the sensing performance of the optomechanical inspired chip-scale sensors.Yongjun HuangJaime Gonzalo Flor FloresZiqiang CaiMingbin YuDim-Lee KwongGuangjun WenLayne ChurchillChee Wei WongNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-7 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Yongjun Huang Jaime Gonzalo Flor Flores Ziqiang Cai Mingbin Yu Dim-Lee Kwong Guangjun Wen Layne Churchill Chee Wei Wong A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics
description	Abstract For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz1/2 resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomechanical coupling is the key parameter for achieving high sensitivity and resolution. Here we demonstrate a chip-scale optomechanical cavity with large mass which operates at ≈77.7 kHz fundamental mode and intrinsically exhibiting large optomechanical coupling of 44 GHz/nm or more, for both optical resonance modes. The mechanical stiffening range of ≈58 kHz and a more than 100th-order harmonics are obtained, with which the free-running frequency instability is lower than 10−6 at 100 ms integration time. Such results can be applied to further improve the sensing performance of the optomechanical inspired chip-scale sensors.
format	article
author	Yongjun Huang Jaime Gonzalo Flor Flores Ziqiang Cai Mingbin Yu Dim-Lee Kwong Guangjun Wen Layne Churchill Chee Wei Wong
author_facet	Yongjun Huang Jaime Gonzalo Flor Flores Ziqiang Cai Mingbin Yu Dim-Lee Kwong Guangjun Wen Layne Churchill Chee Wei Wong
author_sort	Yongjun Huang
title	A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics
title_short	A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics
title_full	A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics
title_fullStr	A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics
title_full_unstemmed	A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics
title_sort	low-frequency chip-scale optomechanical oscillator with 58 khz mechanical stiffening and more than 100th-order stable harmonics
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/e0873c505d804f5ab6e0ef9604e68da4
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A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics

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