A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric s...

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Autores principales:	Xin Xiong, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	optical encoder linear scale pitch deviation stitching interferometry self-calibration Chemical technology TP1-1185
Acceso en línea:	https://doaj.org/article/e0883dca3201466b8d0ea147d04b71f2
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spelling	oai:doaj.org-article:e0883dca3201466b8d0ea147d04b71f22021-11-11T19:19:54ZA Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer10.3390/s212174121424-8220https://doaj.org/article/e0883dca3201466b8d0ea147d04b71f22021-11-01T00:00:00Zhttps://www.mdpi.com/1424-8220/21/21/7412https://doaj.org/toc/1424-8220An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the <i>X</i>-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures’ measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the <i>X</i>-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the <i>X</i>-directional pitch deviation of the linear scale over its whole area.Xin XiongYuki ShimizuHiraku MatsukumaWei GaoMDPI AGarticleoptical encoderlinear scalepitch deviationstitching interferometryself-calibrationChemical technologyTP1-1185ENSensors, Vol 21, Iss 7412, p 7412 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	optical encoder linear scale pitch deviation stitching interferometry self-calibration Chemical technology TP1-1185
spellingShingle	optical encoder linear scale pitch deviation stitching interferometry self-calibration Chemical technology TP1-1185 Xin Xiong Yuki Shimizu Hiraku Matsukuma Wei Gao A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
description	An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the <i>X</i>-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures’ measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the <i>X</i>-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the <i>X</i>-directional pitch deviation of the linear scale over its whole area.
format	article
author	Xin Xiong Yuki Shimizu Hiraku Matsukuma Wei Gao
author_facet	Xin Xiong Yuki Shimizu Hiraku Matsukuma Wei Gao
author_sort	Xin Xiong
title	A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
title_short	A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
title_full	A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
title_fullStr	A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
title_full_unstemmed	A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
title_sort	self-calibration stitching method for pitch deviation evaluation of a long-range linear scale by using a fizeau interferometer
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/e0883dca3201466b8d0ea147d04b71f2
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A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

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