A Novel Design of High Resolution MEMS Gyroscope Using Mode-Localization in Weakly Coupled Resonators
This paper presents a novel design for a high resolution microelectromechanical systems (MEMS) technology based resonant gyroscope using the mode-localization effect in weekly coupled resonators (WCRs) as a mechanism for sensing the input angular rate. The design consists of a single proof mass with...
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| Auteurs principaux: | , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
IEEE
2021
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/e1be6bcaa79d4aa5b1b995eb73104e16 |
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