Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides
Realizing efficient on-chip amplification in silicon is challenging due to either non-compatible integration or small gain per unit length of the amplifier material. Here, the authors report ultra-high on-chip optical gain in erbium-based hybrid silicon nitride slot waveguides with a monolithic, CMO...
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Nature Portfolio
2019
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oai:doaj.org-article:e29aa5a4fef14960abb0c53af5b63fac2021-12-02T15:35:54ZUltra-high on-chip optical gain in erbium-based hybrid slot waveguides10.1038/s41467-019-08369-w2041-1723https://doaj.org/article/e29aa5a4fef14960abb0c53af5b63fac2019-01-01T00:00:00Zhttps://doi.org/10.1038/s41467-019-08369-whttps://doaj.org/toc/2041-1723Realizing efficient on-chip amplification in silicon is challenging due to either non-compatible integration or small gain per unit length of the amplifier material. Here, the authors report ultra-high on-chip optical gain in erbium-based hybrid silicon nitride slot waveguides with a monolithic, CMOS-compatible and scalable atomic-layer deposition process.John RönnWeiwei ZhangAnton AutereXavier LerouxLasse PakarinenCarlos Alonso-RamosAntti SäynätjokiHarri LipsanenLaurent VivienEric CassanZhipei SunNature PortfolioarticleScienceQENNature Communications, Vol 10, Iss 1, Pp 1-9 (2019) |
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Science Q John Rönn Weiwei Zhang Anton Autere Xavier Leroux Lasse Pakarinen Carlos Alonso-Ramos Antti Säynätjoki Harri Lipsanen Laurent Vivien Eric Cassan Zhipei Sun Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides |
description |
Realizing efficient on-chip amplification in silicon is challenging due to either non-compatible integration or small gain per unit length of the amplifier material. Here, the authors report ultra-high on-chip optical gain in erbium-based hybrid silicon nitride slot waveguides with a monolithic, CMOS-compatible and scalable atomic-layer deposition process. |
format |
article |
author |
John Rönn Weiwei Zhang Anton Autere Xavier Leroux Lasse Pakarinen Carlos Alonso-Ramos Antti Säynätjoki Harri Lipsanen Laurent Vivien Eric Cassan Zhipei Sun |
author_facet |
John Rönn Weiwei Zhang Anton Autere Xavier Leroux Lasse Pakarinen Carlos Alonso-Ramos Antti Säynätjoki Harri Lipsanen Laurent Vivien Eric Cassan Zhipei Sun |
author_sort |
John Rönn |
title |
Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides |
title_short |
Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides |
title_full |
Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides |
title_fullStr |
Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides |
title_full_unstemmed |
Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides |
title_sort |
ultra-high on-chip optical gain in erbium-based hybrid slot waveguides |
publisher |
Nature Portfolio |
publishDate |
2019 |
url |
https://doaj.org/article/e29aa5a4fef14960abb0c53af5b63fac |
work_keys_str_mv |
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1718386446108196864 |