Friction Characteristics of Amorphous Carbon Films on Rubber Deposited by Cold Atmospheric Pressure Plasma
Hydrogenated amorphous carbon (a-C:H) films were deposited on rubber surface by plasma-enhanced chemical vapor deposition (CVD), using a non-equilibrium atmospheric pressure plasma torch. The effects of oxygen, in the deposition atmosphere, on the chemical and mechanical characteristics of a-C:H fil...
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Japanese Society of Tribologists
2012
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oai:doaj.org-article:e37a17e8bd3742878da6923341dcd76b2021-11-05T09:24:50ZFriction Characteristics of Amorphous Carbon Films on Rubber Deposited by Cold Atmospheric Pressure Plasma1881-219810.2474/trol.7.234https://doaj.org/article/e37a17e8bd3742878da6923341dcd76b2012-11-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/trol/7/4/7_234/_pdf/-char/enhttps://doaj.org/toc/1881-2198Hydrogenated amorphous carbon (a-C:H) films were deposited on rubber surface by plasma-enhanced chemical vapor deposition (CVD), using a non-equilibrium atmospheric pressure plasma torch. The effects of oxygen, in the deposition atmosphere, on the chemical and mechanical characteristics of a-C:H films were investigated. It was clarified that the amount of carbon atoms combined with oxygen atoms in the a-C:H films increased with the increase of the oxygen content in the deposition atmosphere. On the other hand, surface hardness decreased as the oxygen content increased. As a result, a very low frictional property of a-C:H films was achieved by CVD, using the non-equilibrium atmospheric pressure plasma torch with eliminating oxygen from the deposition atmosphere.Norihito MizoteShin-ichi KurodaJapanese Society of Tribologistsarticlediamond-like carbonamorphous carbonatmospheric pressure plasmacvdoxygenfrictionrubberPhysicsQC1-999Engineering (General). Civil engineering (General)TA1-2040Mechanical engineering and machineryTJ1-1570ChemistryQD1-999ENTribology Online, Vol 7, Iss 4, Pp 234-241 (2012) |
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DOAJ |
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diamond-like carbon amorphous carbon atmospheric pressure plasma cvd oxygen friction rubber Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999 |
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diamond-like carbon amorphous carbon atmospheric pressure plasma cvd oxygen friction rubber Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999 Norihito Mizote Shin-ichi Kuroda Friction Characteristics of Amorphous Carbon Films on Rubber Deposited by Cold Atmospheric Pressure Plasma |
description |
Hydrogenated amorphous carbon (a-C:H) films were deposited on rubber surface by plasma-enhanced chemical vapor deposition (CVD), using a non-equilibrium atmospheric pressure plasma torch. The effects of oxygen, in the deposition atmosphere, on the chemical and mechanical characteristics of a-C:H films were investigated. It was clarified that the amount of carbon atoms combined with oxygen atoms in the a-C:H films increased with the increase of the oxygen content in the deposition atmosphere. On the other hand, surface hardness decreased as the oxygen content increased. As a result, a very low frictional property of a-C:H films was achieved by CVD, using the non-equilibrium atmospheric pressure plasma torch with eliminating oxygen from the deposition atmosphere. |
format |
article |
author |
Norihito Mizote Shin-ichi Kuroda |
author_facet |
Norihito Mizote Shin-ichi Kuroda |
author_sort |
Norihito Mizote |
title |
Friction Characteristics of Amorphous Carbon Films on Rubber Deposited by Cold Atmospheric Pressure Plasma |
title_short |
Friction Characteristics of Amorphous Carbon Films on Rubber Deposited by Cold Atmospheric Pressure Plasma |
title_full |
Friction Characteristics of Amorphous Carbon Films on Rubber Deposited by Cold Atmospheric Pressure Plasma |
title_fullStr |
Friction Characteristics of Amorphous Carbon Films on Rubber Deposited by Cold Atmospheric Pressure Plasma |
title_full_unstemmed |
Friction Characteristics of Amorphous Carbon Films on Rubber Deposited by Cold Atmospheric Pressure Plasma |
title_sort |
friction characteristics of amorphous carbon films on rubber deposited by cold atmospheric pressure plasma |
publisher |
Japanese Society of Tribologists |
publishDate |
2012 |
url |
https://doaj.org/article/e37a17e8bd3742878da6923341dcd76b |
work_keys_str_mv |
AT norihitomizote frictioncharacteristicsofamorphouscarbonfilmsonrubberdepositedbycoldatmosphericpressureplasma AT shinichikuroda frictioncharacteristicsofamorphouscarbonfilmsonrubberdepositedbycoldatmosphericpressureplasma |
_version_ |
1718444381694853120 |