A patterned single layer graphene resistance temperature sensor

Abstract Micro-fabricated single-layer graphenes (SLGs) on a silicon dioxide (SiO2)/Si substrate, a silicon nitride (SiN) membrane, and a suspended architecture are presented for their use as temperature sensors. These graphene temperature sensors act as resistance temperature detectors, showing a q...

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Autores principales:	Benyamin Davaji, Hak Dong Cho, Mohamadali Malakoutian, Jong-Kwon Lee, Gennady Panin, Tae Won Kang, Chung Hoon Lee
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/e4ff190e076849db972dce624e7cbcc8
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spelling	oai:doaj.org-article:e4ff190e076849db972dce624e7cbcc82021-12-02T11:52:37ZA patterned single layer graphene resistance temperature sensor10.1038/s41598-017-08967-y2045-2322https://doaj.org/article/e4ff190e076849db972dce624e7cbcc82017-08-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-08967-yhttps://doaj.org/toc/2045-2322Abstract Micro-fabricated single-layer graphenes (SLGs) on a silicon dioxide (SiO2)/Si substrate, a silicon nitride (SiN) membrane, and a suspended architecture are presented for their use as temperature sensors. These graphene temperature sensors act as resistance temperature detectors, showing a quadratic dependence of resistance on the temperature in a range between 283 K and 303 K. The observed resistance change of the graphene temperature sensors are explained by the temperature dependent electron mobility relationship (~T−4) and electron-phonon scattering. By analyzing the transient response of the SLG temperature sensors on different substrates, it is found that the graphene sensor on the SiN membrane shows the highest sensitivity due to low thermal mass, while the sensor on SiO2/Si reveals the lowest one. Also, the graphene on the SiN membrane reveals not only the fastest response, but also better mechanical stability compared to the suspended graphene sensor. Therefore, the presented results show that the temperature sensors based on SLG with an extremely low thermal mass can be used in various applications requiring high sensitivity and fast operation.Benyamin DavajiHak Dong ChoMohamadali MalakoutianJong-Kwon LeeGennady PaninTae Won KangChung Hoon LeeNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-10 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Benyamin Davaji Hak Dong Cho Mohamadali Malakoutian Jong-Kwon Lee Gennady Panin Tae Won Kang Chung Hoon Lee A patterned single layer graphene resistance temperature sensor
description	Abstract Micro-fabricated single-layer graphenes (SLGs) on a silicon dioxide (SiO2)/Si substrate, a silicon nitride (SiN) membrane, and a suspended architecture are presented for their use as temperature sensors. These graphene temperature sensors act as resistance temperature detectors, showing a quadratic dependence of resistance on the temperature in a range between 283 K and 303 K. The observed resistance change of the graphene temperature sensors are explained by the temperature dependent electron mobility relationship (~T−4) and electron-phonon scattering. By analyzing the transient response of the SLG temperature sensors on different substrates, it is found that the graphene sensor on the SiN membrane shows the highest sensitivity due to low thermal mass, while the sensor on SiO2/Si reveals the lowest one. Also, the graphene on the SiN membrane reveals not only the fastest response, but also better mechanical stability compared to the suspended graphene sensor. Therefore, the presented results show that the temperature sensors based on SLG with an extremely low thermal mass can be used in various applications requiring high sensitivity and fast operation.
format	article
author	Benyamin Davaji Hak Dong Cho Mohamadali Malakoutian Jong-Kwon Lee Gennady Panin Tae Won Kang Chung Hoon Lee
author_facet	Benyamin Davaji Hak Dong Cho Mohamadali Malakoutian Jong-Kwon Lee Gennady Panin Tae Won Kang Chung Hoon Lee
author_sort	Benyamin Davaji
title	A patterned single layer graphene resistance temperature sensor
title_short	A patterned single layer graphene resistance temperature sensor
title_full	A patterned single layer graphene resistance temperature sensor
title_fullStr	A patterned single layer graphene resistance temperature sensor
title_full_unstemmed	A patterned single layer graphene resistance temperature sensor
title_sort	patterned single layer graphene resistance temperature sensor
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/e4ff190e076849db972dce624e7cbcc8
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_version_	1718395017340387328

A patterned single layer graphene resistance temperature sensor

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