A patterned single layer graphene resistance temperature sensor

Abstract Micro-fabricated single-layer graphenes (SLGs) on a silicon dioxide (SiO2)/Si substrate, a silicon nitride (SiN) membrane, and a suspended architecture are presented for their use as temperature sensors. These graphene temperature sensors act as resistance temperature detectors, showing a q...

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Autores principales: Benyamin Davaji, Hak Dong Cho, Mohamadali Malakoutian, Jong-Kwon Lee, Gennady Panin, Tae Won Kang, Chung Hoon Lee
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2017
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Acceso en línea:https://doaj.org/article/e4ff190e076849db972dce624e7cbcc8
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